Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture: 2024-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: REFLEXION LK
Software Version (include revision #): lp3B4.5_29
System Power Rating: AC208V 3-Phase
Loading Configuration: 3 load port
Retrofit Part Type 1: HPMJ
Retrofit Part Description 1: High Pressure Micro Jet Cleaning System
Retrofit Date of Change 1: 07/23/2015 16:00:00
Retrofit Qty 1: 1
Chamber Name 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: NA
Damage/Missing parts list
Missing- Platen Iron plate cover lose Qty 3
Missing- SLURRY SINGLE MANIFOLD Qty 2
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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