Macquarie Semiconductor and Technology on behalf of Inspire Technologies, Inc.
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Caldwell, United States
Available date: Currently Available
Quantity : 2
he Delatech CDO 858/859 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases. Delatech scrubbers are also widely used in Thin Film processes. This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.
CDO 859 Reconditioning Process (high level)
Delatech CDO Selection Criteria
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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