Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.
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PVD (Physical Vapor Deposition)
Date of Manufacture: 2021-02-01
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Richardson, United States
Available date: Currently Available
Custom-built Scia Magna 200 Inline Off-Axis system for depositing Aluminum Nitride at an angle to achieve specific Resonance Frequencies.
Scia has offered to provide Installation Services at the Buyer Facility.
Highlights:
Configuration Specs
| Item | Component | Dimensions | Weight |
| 1 | Heat Exchanger w/ Lines | 57L x 32W x 55H | 470 |
| 2 | Cryo Compressor w/Lines | 39L x 32W x 49H | 486 |
| 3 | Stair Step/ Side Panels/ Carrier Trays | 59L x 40W x 55H | 515 |
| 4 | System Rack | 48L x 36W x 105H | 948 |
| 5 | Equipment Rack | 63L x 45W x 105H | 1963 |
| 6 | Main Body | 139L x 80W x 90H | 7330 |
| 7 | Load Station | 65L x 62W x 76H | 2351 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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