Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2008-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1200492
Micron MISTI/LID #: AMLKK4KR00
Vendor Tool Serial #: 418543
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? Yes
OEM: AMAT
Tool Model: Reflexion-LK
Retrofit Part Type 1: Tool Clean
Retrofit Date of Change 1: 3/11/2013 15:00
Chamber Name 1: Platen1
Chamber Name 2: Platen2
Chamber Name 3: Platen3
Chamber Name 4: Clener Input
Chamber Name 5: Meg
Chamber Name 6: Brush1
Chamber Name 7: Bush2
Chamber Name 8: Dryer
Chamber 1 Description: Polishing Table
Chamber 2 Description: Polishing Table
Chamber 3 Description: Polishing Table
Chamber 4 Description: Clener Input Station
Chamber 5 Description: Megasonic Module
Chamber 6 Description: Brush Module
Chamber 7 Description: Brush Module
Chamber 8 Description: Dryer Module
Chamber 1 Chemicals Gases Used: D4505/STI2401/STI2910
Chamber 2 Chemicals Gases Used: D4505/STI2401/STI2910
Chamber 3 Chemicals Gases Used: D4505/STI2401/STI2910
Chamber 4 Chemicals Gases Used: NA
Chamber 5 Chemicals Gases Used: NA
Chamber 6 Chemicals Gases Used: AD-10/DHF
Chamber 7 Chemicals Gases Used: AD-10
Chamber 8 Chemicals Gases Used: IPA
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
4 Polishing heads and 5 zone head.
UPA 7-zone, → G4
no RTPC
Included IAPC
loadcup is LCWE type
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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