Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc.
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PVD (Physical Vapor Deposition)
Date of Manufacture: 1998-01-01
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: San Jose, United States
Available date: Currently Available
Turnkey Option is Available!
This system can be fully refurbished and rebuilt to meet customer specifications.
Comprehensive warranty (including parts and labor), professional installation, and long-term service options are available.
| Mainframe | |
| S/N | E3493F |
| Vintage | 1998 |
| Wafer size | 150mm(JMF) |
| Buffer Robot | HP |
| Transfer Robot | VHP |
| Loadlock | |
| Type | Manual |
| Body | Narrow |
| Cassette | Metal |
| Mapping | STD |
| Indexer | Manual |
| ChA | PT STD Lid |
| ChB | CD (Flat) STD Lid |
| ChE | Orient Degas With Temp Moniter |
| CHF | Orient Degas With Temp Moniter |
| Process chamber | Ch1 | Ch2 | Ch3 | Ch4 | ChC | ChD |
| Process | AL | TTN GAMMA | TIN | AL | TIN | PreClean |
| Chamber | WC | WB | WB | WC | WB | |
| Source | 11.3 | GAMMA | G12 | 11.3 | G12 | |
| Magnet | Ａ（6”） | GAMMA II | G12 | Ａ（6”） | G12 | |
| Shutter | N/A | Linkage | N/A | N/A | N/A | |
| Gate Valve | 2PGV | 3PGV | 2PGV | 2PGV | 2PGV | |
| Water Baffle | NA | NA | NA | NA | NA | |
| DC Power | 18KS | 24KHz(12kｘ2) | 24KHz(12kｘ2) | 18KS | 24KHz(12kｘ2) |
Buffer Cryo PN: 8116071G001
Transfer Cryo PN: 8116142G001R
Ch1 ESC Pedestal Assembly PN: 0240-76680
Ch1 ESC AC Box PN: 0010-13650
Ch2 ESC AC Box PN: 0010-13650
Ch3 ESC AC Box PN: 0010-13650
ChC ESC AC Box PN: 0010-13650
ChD Wafer Lift Assy PN: 0010-20753
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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