Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2015-01-05
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: Producer GT3
Process: TEOS
Segregation Requirement: Non Metal
Software Version (include revision #): pmB5.4_135
System Power Rating: 208 AC 3-Phase
Loading Configuration: 4 SELOP 7 25 WAFER FOUP (LOADPORT)
Chm/Unit Position 1: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS
Chm/Unit Position 2: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS
Chm/Unit Position 3: PE TEOS GT TWIN CHM A; Chemicals / Gases Used: O2, NF3, AR, TEOS*2, HE_TEOS
Technology: DCVD
Platform Type: Producer GT3
System Software
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0
Mainframe Configuration
Robot type: FX
Robot Blades: 0200-08346
LL preheater: 0090-04659
slit valve door: 9992-00594
MF pump: Ebara ESR80WN
LL pump: EPX 180 TWIN DRY VACCUM PUMP 3620-00517
Diffuser: 0190-37371
Chamber Configuration
Chamber Type: PE Silane
RF Generator 1 (HF): 0920-00139
RF Generator 2 (LF): 0190-08677
Heater: 0010-36734
Slit Valve: 9992-00594
Rf Filter: 0010-42371
Foreline TV: 0190-32100
Foreline ISO: 3870-06775
Gas box: 0040-53688
FACEPLATE: 0040-95475
BLOCKER: 0021-26544
PUMPING LINER side1: 0200-02407
PUMPING LINER side2: 0200-02408
LINER CERAMIC TOP: 0200-06758
LINER CERAMIC MIDDLE: 0200-02973
LINER CERAMIC BOTTOM: 0200-02974
CERAMIC ISOLATOR: 0021-27290
LIFT PINS, FLOATING(BIG FOOT): 0200-03314
LIFT HOOP: 0200-03312
Spacer Side 1: 0021-24181
Spacer Side 2: 0021-24182
RPS: 0190-40602
Gas Box Configuration
Line 1: - EMPTY -
Line 2: - EMPTY -
Line 3: TEOS_1 - 7000
Line 4: TEOS_2 - 7000
Line 5: - EMPTY -
Line 6: NF3 - 5000
Line 7: - EMPTY -
Line 8: AR - 10000
Line 9: HE_TEOS - 15000
Line 10: - EMPTY -
Line 11: - EMPTY -
Line 12: O2 - 15000
Line 13: - EMPTY -
Line 14: - EMPTY -
Line 15: - EMPTY -
Line 16: - EMPTY -
Line 17: - EMPTY -
Line 18: Purge02
Line 19: Purge03
Line 20: - EMPTY -
Line 21: - EMPTY -
Line 22: - EMPTY -
Process Pump/Abatement
Pump: KASHIYAMA SDE1203B
Liquid line temp.
TEOS_1 injection temp.: 150
TEOS_2 injection temp.: 150
Heated line2: 120
Heated line3: 120
Heated line4: 120
Heated line5: 120
Heated line6: 120
Heated line7: 120
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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