Macquarie Semiconductor and Technology on behalf of Macquarie Semiconductor and Technology Inc. Taiwan Branch - UMC

Varian Semiconductor Equipment Associates (VSEA) VIISta 810


The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.

Asset ID: 209719

Enquire about this product Print spec sheet

Varian Semiconductor Equipment Associates (VSEA)

VIISta 810

Mid Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2001-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Need use the destructive methods to deinstallation the equipment. MANY COMPONENTS ARE MISSING.

Damage/Missing parts list, please inspect tool to reconfirm.

Dry pumps and Chiller and Cryo Compressors not included on sales.

Inspect to confirm configuration and condition.

Loading Configuration FOUP

Number of Cassette/FOUP Positions is 4

Loadport Make/Model ASYST 300 OHT Transport (300mm)  

Date of Last PM is 2013/5

The system not On-Line

Off-Line Date is 2014

All Cables are Present 

GEM/SECS Interface

Standard Network Communication Capability  

Mid Current 810 Classic 

Energy Range is 270kv

Maximum Energy is 270kv

Dose Range is 1e11~1e13

Programmable Tilt Angle is 7

Tilter Head Revision is Type c

Bernas source

Dual Vaporizer 

Dimmer Magnet Turbo

Source Turbo

EndStation Turbo

Process Chamber Cryo (x3)

Scan Chamber Cryo

Gas Type





Chiller not Included

Dry Pumps not Included

Dry Pump Make Model is IQDP80

Dry Pump Make Model is IQDP80-500

Cryo Compressors not Included  

Make Model is CTI

Quantity is 2

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.