Macquarie Equipment Trading on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC

CAMECA EX-300

Asset ID: 204528

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CAMECA

EX-300

Implant Dosing Measurement

Metrology Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Tainan 744, Taiwan

Available date: Currently Available

Inspect to confirm configuration and condition.

The tool is running .

Configuration :

Install date : 2013/08/20

Last PM date : 2015/07/22

System SW(OS) version is Win 7

System SW(App) version is Release 1.5 Patch 11

All the cables are present


Wafer Handler :

Handler Type is Brooks and Cassette/FOUP Loaders are two

Robot Type is Brooks and include the Pre-Aligner


Communication Interface is GEM HosT 5050


Supporting Equipment :

Power Supply is 208V single phase(3write), 57~63hz, 13.5~15A

Backing Pump is Edward-IH80*2ea


Facility Requirements :

CDA : 6~7bar

Vacuum : Lower than 200mbar absolute 18splm

Gas : Ar 90% +/-1%

CH4 3bar

Power : 208V single phase(3write), 57~63hz, 13.5~15A





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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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