Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Edwards HOX

Asset ID: 211190

Print spec sheet

Edwards

HOX

Abatement - Exhaust Management System

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Total Qty: 2


BrandModuleS/NTool / LocationAsset No.
EDWARDSHOX37976833FABB A8.5-53A53BE0814
EDWARDSHOX37976832FABB A8.5-53A53BE0815





HOx – Hot Oxidation System

The Hot Oxidation System (HOx) offers a significant advance in the performance of non-fuel oxidation technology. Targeted at CVD applications, the system ensures safe removal of pyrophoric gases to below flammable limits and the effective treatment of acidic by-products to prevent exhaust duct corrosion.

 The HOx combines an innovative electrical heated oxidation unit with the proven three-stage wet scrubber from the inward-fired combustor product range to deliver excellent powder handling capabilities.


Applications

Ideal for most CVD applications including:

  • PECVD TEOS, BPSG, Oxide
  • PECVD Nitride
  • Tungsten CVD
  • LPCVD


Features and Benefits

  • Low capital cost
  • Low cost of ownership
    • No fuel
    • Low water use
    • Low power
    • Small footprint
  • Enhanced security
    • PLC controlled
    • Full system monitoring
    • Tool interface
    • SEMI S2-93 compliant
  • Superior design
    • High performance
  • Up to 4 independent self cleaning inlets
  • Unique oxidation chamber design increases destruction efficiencies while minimizing particulate deposition
  • Proven three stage wet scrubber (from the inward fired combustor range) provides blockage-free particulate entrapment and highly efficient acid gas removal
  • Novel construction on sliding platform provides easy servicing, resulting in lower maintenance requirements compared to competing units
  • Integral bypass valves available as optional extra feature
  • Integral water recirculation unit available as optional extra feature, to minimize utility consumption and COO


Technical Data

Connections
 Process gas inletsNW40 SS, 4 inlets
 Exhaust outlet75mm flexible bellows
 Nitrogen inlet1/4" Swagelok ®
Stainless steel 4-6 bar gauge
 Water3/4" bore PVC Pipe
 PCW3/4" bore PVC Pipe
(water recirculation unit)
Power Requirements
 SupplyThree phase 415/380v, 50Hz
 OrThree phase 208v, 50/60Hz
 ConsumptionNominal 5kW
Mechanical Data
 Dimensions1300x600x1835mm
 Mass400kg





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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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