Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2006-03-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: SCRUB
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1306570
Micron MISTI/LID #: WTELB3RD00
Vendor Tool Serial #: EH26102
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: TEL
Tool Model: NS300
Software Version (include revision #): 3.04.082S
System Power Rating: 208AC 3-phase
Loading Configuration 4 load ports
Retrofit Part Type 1: NA
Chamber Name 1: Process Modules
Chamber Name 2: Process Modules
Chamber Name 3: Process Modules
Chamber Name 4: Process Modules
Chamber Name 5: resistivity
Chamber Name 6: AC power box
Chamber Name 7: wafer transfer system
Chamber Name 8: wafer transfer system
Chamber Name 9: FOUP load/unload system
Chamber 1 Description: unit 2-1 machinery chuck
Chamber 2 Description: unit 2-2 machinery chuck
Chamber 3 Description: unit 2-3 Vacuum chuck
Chamber 4 Description: unit 2-4 Vacuum chuck
Chamber 5 Description: e-flow
Chamber 6 Description:
Chamber 7 Description: CRA transfer
Chamber 8 Description: PRA transfer
Chamber 9 Description: 4 Loadport
Chamber 1 Chemicals Gases Used: N2 , H2O
Chamber 2 Chemicals Gases Used: N2 , H2O
Chamber 3 Chemicals Gases Used: N2 , H2O
Chamber 4 Chemicals Gases Used: N2 , H2O
Chamber 5 Chemicals Gases Used: CO2 , H2O
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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