Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Quixace II ALD Oxide


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Asset ID: 19645

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Quixace II ALD Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2011-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: ALDSIOX

Furnace Unit      

Cartridge Heater:D4EX22250, RHC2 Heater

T/C for Heater Control:D4EX15442   

T/C for Sub Heater Control   

T/C for Over temperature Protection:D4EX15442   

5-P T/C for Cascade Control:D4EX29950,L type(5P)

5-P T/C for Profile Control: OPTION

1-P T/C for Profile Control:D4EX21001,OPTION 

Thyristor Unit for Control:SKKT160L5Z4F-HKD,Air cooling type

Clean Unit      

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)


Main Controller(OU):D4EX35757(CX5000)   

Main Operation Unit:TM150-HKT02   

Sub Operation Unit:D4EX35758 (KDSC-2005SUBDISP)   

Process Module Controller:D4EX43195(PMC5000)   

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)   

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit   CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX   

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02

Drive Mechanisms   

I/O Shutter   

AGV/PGV/OHT Stage   

FOUP Loader   

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer: Lift Transfer

Variable Wafer Pitch Converter   

Boat Elevator   

Boat Changer   

Furnace Port Shutter   

Boat Rotation   

Gas System   

Gas Unit(IGS):N2, NF3

Tape Heater for gas pipe

Exhaust System      

Diaphragm Sensor (1000Torr):631C13TBEH, Made by MKS

Diaphragm Sensor (10Torr):631C11TBEH, Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA, Made by MKS

Main Valve:VEC-SHA8-X0326, Made by CKD

Exhaust Piping   

Exhaust Dilution Line   

Reactor Tube Press Leak Line      

Back Ground Line: HCD, H2O, Catalyst, NF3

Jacket Heater for exhaust pipe:D4EX37739,Made by MKS

Seal Cap Heater:ESH-13049-02,Made by SHINWA VANES

Inlet Heater:D4EX33554,Made by TOKYO GIJUTSU

Cold Trap


Light Curtain System:SL-C52H, Made by KEYENCE



OHT I/F UNIT:DMJ-GB1, Prepared By User (E84 Sensor)





Missing/Damaged Parts List:

None report, please inspect tool to reconfirm

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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