Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Tokyo Electron Ltd. (TEL) Tactras Vesta NV3

Asset ID: 207711

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Tokyo Electron Ltd. (TEL)

Tactras Vesta NV3

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Korea, Republic of

Available date: Currently Available

  1. Main Frame
    1. 1 * Loader Module
      1. 3 * Load Port Unit
    2. 1 * Vaccum Transfer Module
      1. 1* Transfer Module
      2. 2*Loadlock Module
    3. 4 * Process Module​
      1. 4 * Process Module
      2. 3 * HF RF Power Supply
      3. 4 * Gas Box
      4. 3 * RF Generators
      5. 3 * TMP Controller
  2. Support Equipment
    1. 2 * AC Distribution Box


Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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