Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
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Varian Semiconductor Equipment Associates (VSEA)
Date of Manufacture: 2005-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
| Software Version | VCS 7.67 | |||||||
| System Power Rating | 208 VAC | |||||||
| Loading Configuration | 4 Loadport | |||||||
Gases
Used | ||||||||
| Ar | ||||||||
| BF3 | ||||||||
| AsH3 | ||||||||
| PH3 | ||||||||
Module | Common/Area Specific | Component | Sub-component | Checkpoint | Spec | Power up | Result | Judgement |
| (Y/N) | ||||||||
| Frontend interface | Common | Load Port | Stage | Particle, rusting parts | No visual particle & rusty parts | Y | Fixload 6M | OK |
| Barcode reader | Particle, rusting, motion | No visual particle & rusty parts | Y | OK | ||||
| Door | Particle, rusting, motion | No visual particle & rusty parts | Y | OK | ||||
| Common | FI Robot | Blade | Cracking | No damage | Y | Brooks DBM | OK | |
| End effector | Wearing | No damage | Y | OK | ||||
| Bolts | Rusting | No rusty | Y | OK | ||||
| Robot | Motion | No alarm when tool execute initial | Y | OK | ||||
| Load Lock | IMP Specific | Door | O-ring | Visually check not cracking and corrosion | surface no damage | Y | OK | |
| IMP Specific | Elevator | Drive Shaft | Visually check not cracking and rusting | Visually check not cracking and rusting | Y | OK | ||
| IMP Specific | lead screw | Visually check not cracking and rusting | Visually check not cracking and rusting | Y | OK | |||
| IMP Specific | Cassette Platform | Cassette Sense cable | Visually check not cracking | Cable condition (破皮) | Y | OK | ||
| Process Chamber | IMP Specific | Air Bearing | Air Bearing shaft | Visually check not cracking and rusting | Function | Y | OK | |
| Vacuum burst | Cycle test and check IG3 burst within 5e-7 | Pressure gap < 5e-7 torr when Air bearing function work | Y | OK | ||||
| PFG | PFG | water cooling quick connector not leak | No leakage | Y | OK | |||
| Base Vacuum | IG3 | Shutdown beam within 5e-7 torr | Pressure gap < 5e-7 torr when beam shut down | Y | OK | |||
| Profiler | shaft | Visually check not cracking and corrosion | Visually check not cracking and corrosion | Y | OK | |||
| Vacuum burst | Cycle test and check IG3 burst within 5e-7 | Cycle test and check IG3 burst within 5e-7 | Y | OK | ||||
| Incident Angle Cup | water tube | No leak | Check dose cup cable condition | Y | OK | |||
| Siginal cable | Visually check not cracking and corrosion | Check dose cup cable condition | Y | OK | ||||
| Source Subsystem | IMP Specific | Gas Box | Gas sticks | Visually check not cracking and corrosion | Y | Ar, BF3, AsH3, PH3 | OK | |
| IMP Specific | Bottle clamper | Visually check not cracking and shortage | Y | OK | ||||
| IMP Specific | Exhaust hose tube | Visually check not cracking | Check door interlock | Y | OK | |||
| IMP Specific | Manipulator | Assembly | Visually check not cracking and shortage | Y | ||||
| IMP Specific | Source cover | Visually check not cracking and shortage | Y | OK | ||||
| IMP Specific | Safety switch, not bypasee and push | Y | OK | |||||
| with dscouraged | ||||||||
| IMP Specific | Filement | Cables condition | Connector & cable not cracking | Y | OK | |||
| IMP Specific | Resolving Aperture | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | Setup Cup | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | Vacuum(IG2) | in & out vacuum no change | IG2 vacuum < 5e-7 | Y | OK | |||
| IMP Specific | Q2 & Q3 | Assembly | Visually check not cracking and shortage | Y | OK | |||
| IMP Specific | quick connecor | No water leak | Y | OK | ||||
| IMP Specific | interlock Switch | Visually check not cracking and shortage | Y | OK | ||||
| Support Subsystem | IMP Specific | Control Subsystem | lightlink comnination | all loop need get 1st priority loop | Y | OK | ||
| IMP Specific | KVM switch function | make sure IAN & NCS can switch | Y | oK | ||||
| IMP Specific | Remote Chiller | Not water leak | Visually check Water tray | Y | OK | |||
| IMP Specific | Tempture control | Manual set to15 ֯C | Confirm chiller cool down to 15 degree | Y | OK | |||
| IMP Specific | Cryo Pumps | pump | not noise when running | Y | OBIS 320 FE | OK | ||
| IMP Specific | compressor | hilum presure | Y | IS-1000 | OK | |||
| IMP Specific | Not water leak | Y | OK | |||||
| IMP Specific | Roughing Pump | pump | Not water leak | Y | Was originally Ebara A10S, Not included | OK | ||
| IMP Specific | enclosure | Doors & panels | Function normal no cracking & rusting | Y | OK | |||
| IMP Specific | HV light(if have) | Function normal | Y | |||||
| IMP Specific | Component | no shortage parts | Y | OK | ||||
| IMP Specific | Ground handle Bar | no shortage parts | Y | OK | ||||
| IMP Specific | Gas Box Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 90 Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 70 Ground shouting Bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | 70/90 Shorting bars | Visually check not cracking | Y | OK | ||||
| IMP Specific | D2S Shorting Bar | Visually check not cracking | Y | OK | ||||
| IMP Specific | Isolation feet(gas box.70.90) | Visually check not cracking | Y | OK | ||||
| IMP Specific | Water system | Pump | not leak | Y | OK | |||
| IMP Specific | Filter | not leak | Y | OK | ||||
| IMP Specific | All Zones manifold | not leak | Y | OK | ||||
| IMP Specific | Flow sensor not bypass | check universal setting | Y | OK | ||||
| IMP Specific | Safety | EMO buttons | Visually check not cracking | Y | OK | |||
| ES137172
| ||||||||
Description Crate Dims Wt (lbs)
90 MODULE /BEAM,EXHAUST LINE 1 89X96X102 15500
MAIN FRAME PD 2 63X63X110 4500
70 MODULE 3 63X70X102 12566
END MODULE 4 110X96X110 14800
BUFFER 5 128x75x103 3600
ENCLOSURE DOOR#3 6 114X51X48 1886
ENCLOSURE DOOR#1,SIDE PANEL,COVERS 7 110X48X53 2250
ENCLOSURE DOOR#2,ROOFPANEL,CABLE TRAY 8 154X53X53 2899
MAIN BODY PLATE#1 9 89X48X24 2881
MAIN BODY PLATE#2 10 63X48X26 1220
FACILITY COOLING EXHAUST 11 89X37X36 335
GAS BOX 12 45X44X60 712
CHILLER,70 TRANSFORMER 13 57X48X44 1020
MAIN TRANSFORMER. HELIUM 14 43X38X54 1891
CRYO COMPRESSOR 15 51X36X39 606
REMOTE PDU 16 63X36X26 270
BOXES X7 17 86X44X51 1180
FACILITY COOLING EXHAUST DOCK 18 45X45X28 200
V4 COVER,70WAVEGUIDE,SCANCOVER 19 85X41X34 600
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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