Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Varian Semiconductor Equipment Associates (VSEA) VIISta HC

Disclaimer

The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.


Asset ID: 210306

Enquire about this product Print spec sheet

Varian Semiconductor Equipment Associates (VSEA)

VIISta HC

High Current Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2005-01-01

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Software Version VCS 7.67
System Power Rating208 VAC
Loading Configuration4 Loadport
Gases Used
Ar
BF3
AsH3
PH3
Module
Common/Area SpecificComponentSub-componentCheckpointSpecPower upResultJudgement
(Y/N) 
Frontend interfaceCommonLoad PortStageParticle, rusting partsNo visual particle & rusty partsYFixload 6MOK
  Barcode readerParticle, rusting, motionNo visual particle & rusty partsY OK
  DoorParticle, rusting, motionNo visual particle & rusty partsY OK
CommonFI RobotBladeCrackingNo damageYBrooks DBMOK
  End effectorWearingNo damageY OK
  BoltsRustingNo rustyY OK
  RobotMotionNo alarm when tool execute initial Y OK
Load LockIMP SpecificDoorO-ringVisually check not cracking and corrosionsurface no damageY OK
IMP SpecificElevator Drive ShaftVisually check not cracking and rustingVisually check not cracking and rustingY OK
IMP Specific lead screwVisually check not cracking and rustingVisually check not cracking and rustingY OK
IMP SpecificCassette PlatformCassette Sense cableVisually check not crackingCable condition (破皮)Y OK
Process ChamberIMP SpecificAir BearingAir Bearing shaftVisually check not cracking and rustingFunction Y OK
 Vacuum burstCycle test and check IG3 burst within 5e-7Pressure gap < 5e-7 torr when Air bearing function workY OK
PFGPFGwater cooling quick connector not leakNo leakageY OK
Base VacuumIG3Shutdown beam within 5e-7 torrPressure gap < 5e-7 torr when beam shut downY OK
Profilershaft Visually check not cracking and corrosionVisually check not cracking and corrosionY OK
 Vacuum burstCycle test and check IG3 burst within 5e-7Cycle test and check IG3 burst within 5e-7Y OK
Incident Angle Cupwater tubeNo leakCheck dose cup cable conditionY OK
 Siginal cableVisually check not cracking and corrosionCheck dose cup cable conditionY OK
Source SubsystemIMP SpecificGas BoxGas sticksVisually check not cracking and corrosion YAr, BF3, AsH3, PH3OK
IMP Specific Bottle clamperVisually check not cracking and shortage Y OK
IMP Specific Exhaust hose tube Visually check not crackingCheck door interlockY OK
IMP SpecificManipulatorAssemblyVisually check not cracking and shortage Y  
IMP Specific Source coverVisually check not cracking and shortage Y OK
IMP Specific  Safety switch, not bypasee and push Y OK
with dscouraged 
IMP SpecificFilementCables conditionConnector & cable not cracking Y OK
 IMP SpecificResolving ApertureAssemblyVisually check not cracking and shortage Y OK
IMP SpecificSetup CupAssemblyVisually check not cracking and shortage Y OK
IMP Specific Vacuum(IG2)in & out vacuum no changeIG2 vacuum < 5e-7Y OK
IMP SpecificQ2 & Q3AssemblyVisually check not cracking and shortage Y OK
IMP Specific quick connecorNo water leak Y OK
IMP Specific interlock Switch Visually check not cracking and shortage Y OK
Support SubsystemIMP SpecificControl Subsystemlightlink comninationall loop need get 1st priority loop Y OK
IMP Specific KVM switch functionmake sure IAN & NCS can switch Y oK
IMP SpecificRemote ChillerNot water leakVisually check Water tray Y OK
IMP Specific Tempture controlManual set to15  ֯CConfirm chiller cool down to 15 degreeY OK
IMP SpecificCryo Pumpspumpnot noise when running YOBIS 320 FEOK
IMP Specific compressorhilum presure  YIS-1000OK
IMP Specific  Not water leak Y OK
IMP SpecificRoughing PumppumpNot water leak YWas originally Ebara A10S, Not includedOK
IMP SpecificenclosureDoors & panelsFunction normal no cracking & rusting Y OK
IMP Specific HV light(if have)Function normal Y  
IMP Specific Componentno shortage parts Y OK
IMP Specific Ground handle Barno shortage parts Y OK
IMP Specific Gas Box Ground shouting BarsVisually check not cracking Y OK
IMP Specific 90 Ground shouting BarsVisually check not cracking Y OK
IMP Specific 70 Ground shouting BarsVisually check not cracking Y OK
IMP Specific 70/90 Shorting barsVisually check not cracking Y OK
IMP Specific D2S Shorting BarVisually check not cracking Y OK
IMP Specific Isolation feet(gas box.70.90)Visually check not cracking Y OK
IMP SpecificWater systemPump not leak Y OK
IMP Specific Filter not leak Y OK
IMP Specific All Zones manifoldnot leak Y OK
IMP Specific Flow sensor not bypasscheck universal setting Y OK
IMP SpecificSafetyEMO buttonsVisually check not cracking Y OK
ES137172
  

Description                                                                         Crate           Dims                Wt (lbs)


90 MODULE /BEAM,EXHAUST LINE                                    1            89X96X102       15500

MAIN FRAME PD                                                                    2            63X63X110         4500

70 MODULE                                                                            3            63X70X102       12566

END MODULE                                                                         4          110X96X110       14800

BUFFER                                                                                    5           128x75x103         3600

ENCLOSURE DOOR#3                                                            6            114X51X48         1886

ENCLOSURE DOOR#1,SIDE PANEL,COVERS                       7            110X48X53         2250

ENCLOSURE DOOR#2,ROOFPANEL,CABLE TRAY               8            154X53X53         2899

MAIN BODY PLATE#1                                                            9              89X48X24          2881

MAIN BODY PLATE#2                                                          10              63X48X26          1220

FACILITY COOLING EXHAUST                                             11              89X37X36            335

GAS BOX                                                                               12             45X44X60            712

CHILLER,70 TRANSFORMER                                                13             57X48X44          1020

MAIN TRANSFORMER. HELIUM                                         14             43X38X54           1891

CRYO COMPRESSOR                                                            15             51X36X39             606

REMOTE PDU                                                                        16             63X36X26             270

BOXES X7                                                                               17             86X44X51           1180

FACILITY COOLING EXHAUST DOCK                                  18             45X45X28             200

V4 COVER,70WAVEGUIDE,SCANCOVER                           19             85X41X34             600

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.