Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Date of Manufacture: 2023-06-01
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
Loading Configuration | Open Cassette |
Is System On-Line? | Yes |
CE Mark Certified? | Yes |
OEM Audit Available? | Yes |
Can Produce Wafers AS IS? | Yes |
Any Known Field Modifications? | Yes |
All Cables Present? | Yes |
GEM/SECS Interface | Yes |
SECS II Interface | Yes |
Standard Network Communication Capability | Yes |
System Configuration | Model Type |
DTU | DTU1553 |
Temperature control | Yes |
Key Common Options | Included? |
Clean Room Manuals | Yes |
Standard Manuals | Yes |
Machine Configuration | |
UPS | Yes |
Main power supply | Yes |
Turn table float amount | Yes |
Exhaust pressure | Yes |
Individual unit initialization | Yes |
Z2-axis spindle parallelism | Yes |
Z2-axis inclination adjustment (on the C/T axis) | Yes |
Z3-axis inclination adjustment (on the C/T axis) | Yes |
C/T centering and installation | Yes |
Performing self-grinding | Yes |
Z2-axis inclination (on the C/T) | Yes |
Z1-axis inclination (on the C/T) | Yes |
Z3-axis inclination (on the C/T) | |
auto setup operation (Option) | Yes |
IPG origin position adjustment | Yes |
NCG setup (Option) | Yes |
Nozzle adjustment | Yes |
T1 adjustment | Yes |
T2 adjustment | Yes |
Z2 Spindle Flat Position | Yes |
Z2 C/T Inclination | Yes |
Z2 C/T Inclination | Yes |
Including DTU1550
1. FOUP/mapping function available or not: not supported.
2. Support for 12 inch parts or not: no 12inch parts.
3. Whether both chuck tables are 8/12 inch: 6” chuck but capable of adopting 12” chuck
4. Whether both spindles are 8/12 inch: 12” base
5. Z3 spindle for grind or polish: All spindles are grind and not capable of using polish on Z3 with POR condition.
6. Presence of vacuum unit: includes vacuum pump
7. Presence of dust collection unit: includes dust collection unit
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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