Macquarie Semiconductor and Technology on behalf of Confidential Seller
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Wafer Automation / Wafer Environment
Date of Manufacture: 2016-08-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
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Notes: | |
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Has Keyence Ion Bar Charge Neutralizer | |
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General System Info | |
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Date of Audit |
10/10/2025 |
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Fab Equipment ID |
WFRSORTER002 |
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Manufacturer (Make) |
NADAtech |
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Model |
RN47/M4S |
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Serial Number |
16-1134-0209 |
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Wafer Size (inches) |
4 & 6 |
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Install Type: TTW / Stand-Alone |
Stand alone |
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OEM MFG Date |
8/20/2016 |
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Date of Last PM |
6/12/2025 |
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Is System On-Line? |
YES |
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Are any Manuals included ? |
STD |
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OEM Audit Available? |
NO |
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3rd Party Audit Available ? |
NO |
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Decontamination Report Exists? |
NO |
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Overall Tool Condition | |
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Any Field Modifications ? |
NO |
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All Cables present ? |
YES |
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Any Corrosion visible on modules ? |
NO |
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Any Missing / Damaged Parts ? |
NO |
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Shipping Brackets Included ? |
NO |
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Wafer Handler |
YES |
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Handler Type |
Manual |
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# of Cassette / FOUP Loaders |
4 |
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Robot Type |
PRI/Equipe ATM10x |
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End-Effecter Type |
dual |
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Pre-Aligner ? |
YES |
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Mini-Environment |
NO |
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System Software | |
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System SW (App) version |
Windows 7 OS |
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SEMI Std Options (E84, E99, etc..) |
SEMI E30 |
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Communication Interface | |
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GEM / SECS ? |
yes |
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Supporting Equipment | |
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UPS |
yes |
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Facility Requirements | |
|
Vacuum |
PVAC |
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Gas |
N2 |
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Power |
120V/1ph/10A |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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