Macquarie Semiconductor and Technology on behalf of Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V. for its Fraunhofer-Institut fur Mikroelektronische Schaltungen und Systeme IMS
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Date of Manufacture: 1997-12-31
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Duisburg, Germany
Available date: Currently Available
Process & Capability
· Applications: Amorphous silicon (600–800 nm) and doped poly-silicon deposition
· Batch size: Up to 150 wafers
· Cassette buffer: No – loading via single cassette at the front
· Loadlock: No – open system
· Wafer transfer: Robot loads quartz boat from cassette, 25 wafers per transfer
· Temperature range: Up to 700 °C (max), standby 550 °C
· Temperature zones: 4 zones, each controlled by its own thermocouple
· Process gases (previously connected): N₂-HD, N₂, SiH₄, PH₃, CDA
Current Condition / Known Issues
· Quartz boat transfer does not move (neither in nor out).
· Problem occurred while unloading the boat (moving out of the furnace).
· Last process check: 2022-06-10.
· Tool has been out of operation since 2025-02-03.
· Tool and pump are currently switched off.
· All Kokusai N₂ and N₂ (6.0) lines are isolated at the main headers (facility level).
· SiH₄ line is isolated in the gas distribution (facility level).
***Seller may require Macquarie to manage the deinstallation, rigging, and crating at Buyer’s expense. Quotes for these services may be provided to buyer following tool award, or upon request.***
Shipping is the full responsibility of the buyer using their selected vendor, however transportation/shipping quotes are also available upon request.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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