Macquarie Semiconductor and Technology on behalf of ON Semiconductor Czech Republic s.r.o.
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SPTM (formerly Aviza/SVG/Thermco)
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Czech Republic
Available date: Currently Available
| PROCESS TYPE | CVD Undoped Poly |
| MODEL | SVG VTR 7000 |
| SERIAL NUMBER | V7-132 |
| EQUIPMENT ID (PREVIOUS OWNER) | AFVTR10 |
| SYSTEM CONTROLLER | PCE |
| SECS/GEM COMMUNICATION | NO |
| LOAD STATION: | |
| SMIF LOADER | NO |
| N2 PURGED LOADLOCK | NO |
| WIP CARRIER STORAGE CAPACITY | 2 Boats |
| END-EFFECTOR | WTM Loader |
| WAFER SPACING | 0,14 in |
| LOADSIZE (#SLOTS) | 160 Slots |
| BOAT ROTATION | NO |
| FURNACE: | |
| TEMPERATURE CONTROLLER | MBTC |
| NUMBER OF ZONES | 3 |
| HEATER TYPE | Black Max |
| PROCESS TEMPERATURE RANGE | 300°C - 800°C |
| FLATZONE LENGTH | |
| RAPID COOLING CONFIGURATION | NO |
| PROCESS TUBE MATERIAL | Quartz |
| WAFER BOAT MATERIAL | Quartz/SiC |
| TUBE SEAL CONFIGURATION | Red Silicone O-Rings |
| TEMPERATURE CONTROL METHODOLOGY | MBTC |
| THERMOCOUPLE TYPE | R |
| EXTERNAL TORCH | NO |
| H2 BURN OFF | NO |
| BUBBLER SYSTEM | NO |
| GAS LEAK DECTECTION | NO |
| MOISTURE SENSOR | NO |
| PROCESS GASES (LPCVD) | |
| MFC MODEL/TYPE | Unit, Tylan |
| PROCESS GASES | SiH4 |
| TEOS DELIVERY SYSTEM | NO |
| OTHER GASES | N2 |
| FORELINE SIZE | 80mm |
| PRESSURE CONTROLLER | MKS |
| PRESSURE CONTROL METHODOLOGY | Throttle Valve |
| PROCESS MANOMETER | Baratron 2Torr, 1000Torr |
| PUMP MANOMETER | Baratron 10Torr |
| INLINE COLDTRAP | NO |
| INLINE PARTICLE TRAP | NO |
| EXHAUST CONTROLLER | NO |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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