Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Date of Manufacture: 2023-10-02
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| LEAD Model Number | VULCAN-V61MD | |||
| Process Name | SiC_GOX | |||
| Customer Process Name | SiC_GOX | |||
| Temperature Range | 700~1250 degree | |||
| General Configuration | ||||
| Heater Type | VN-V81MDP-2005-1400 | |||
| Number of Zones | 5 Zones | |||
| Temperature Controller Model | EUROTHERM MINI-16LP | |||
| Wafer Handling | ||||
| Wafer Handler Type | 5 Forks | |||
| Fork Material | CERAMIC | |||
| Stocker | 21 Carrier / Other | |||
| Batch/Load Size | 150wfs | |||
| Gas Panel Configuration | ||||
| MFC Type | ||||
| Pressure Display Units | ||||
| Gas | MFC Model | MFC Size | ||
| N2 | SEC-Z512MGX | 30slm | ||
| O2 | SEC-Z512MGX | 20slm | ||
| O2 | SEC-Z512MGX | 500sccm | ||
| H2 | SEC-Z512MGX | 10slm | ||
| N2O | SEC-Z512MGX | 10slm | ||
| N2 | SEC-Z512MGX | 100sccm | ||
| Ar | SEC-Z512MGX | 10slm | ||
| NO | SEC-Z512MGX | 10slm | ||
| N2 | SEF-Z512MGX | 2slm | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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