Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture: 2005-09-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| Serial Number | L000005Y5385 | ||||
| Install Type | Stand Alone | ||||
| Original Ship Date | 3/15/2023 | ||||
| Date of Last PM | 2/3/2025 | ||||
| Is System On-Line? | No | ||||
| Off-Line Date (if applicable) | 3/24/2025 | ||||
| CE Mark Certified | Yes | ||||
| SECS/GEM | Yes | ||||
| Clean Room Manuals | No | ||||
| CD Manuals | No | ||||
| OEM Audit Available? | No | ||||
| Decontamination Report Exists? | Yes | ||||
| Can Produce Wafers AS IS? | Yes | ||||
| Any Known Field Modifications? | No | ||||
| All Cables Present? | Yes | ||||
| TEL Model Number | Alpha 303i | ||||
| TEL Process Name | HTO | ||||
| Customer Process Name | HTO | ||||
| Temperature Range | 600-850 | ||||
| Front Surface Finish | White | ||||
| Process Pressure | Sub-Atm | ||||
| Number of Zones | 5 | ||||
| Inner TC Type | Yes | ||||
| Rapid Cooling Unit | No | ||||
| Boat Rotation | Yes | ||||
| Tube Seal | Yes | ||||
| Remote MMI and Gas Flow Chart | No | ||||
| Signal Lamp Tower | Yes | ||||
| Gas Leak Detection | No | ||||
| Wafer Size | 12 | ||||
| Wafer Type | Notch | ||||
| Bolt-On-SMIF | No | ||||
| Integrated SMIF | No | ||||
| Wafer Handler Type | KHI | ||||
| Fork Material | Ceramic | ||||
| Stocker | 16 | ||||
| Batch/Load Size | 84 | ||||
| N2 Purge System | Yes | ||||
| Transfer Stage Wafer Position Sensor | Yes | ||||
| Fork Wafer Present Sensor | Yes | ||||
| Notch Alignment | No | ||||
| Fork Wafer Position Sensor | Yes | ||||
| MFC Type | |||||
| Pressure Display Units | Mpa / Other | ||||
| Gas | MFC Model | Line | MFC Size | ||
| PN2 | STEC | 50l | |||
| PN2 | STEC | 1l | |||
| PN2 | STEC | 30l | |||
| PN2 | STEC | 5l | |||
| PN2 | STEC | 1l | |||
| SiH4 | STEC | 100sccm | |||
| N2O | STEC | 5l | |||
| N2O | STEC | 300sccm | |||
| DCS | STEC | 300sccm | |||
| Vacuum Pump Included | No | ||||
| Make | Edwards | ||||
| Model | 1820 | ||||
| N2 Ballast Pressure Control | No | ||||
| Trap | No | ||||
| Heated Lines | No | ||||
| Pressure Display Units | Torr | ||||
| Main Valve | CKD | ||||
| Furnace Exhaust Connection Point | Bottom | ||||
| Cooling Water Connection | Bottom | ||||
| Incoming Gas Connection | Bottom | ||||
| Vacuum Foreline | Bottom | ||||
| Vent (Process) Exhaust Connection | Bottom | ||||
| Gas Unit Exhaust Connection | Bottom | ||||
| Pressure Relief Drain | Bottom | ||||
| Cabinet Exhaust Display Units | Bottom | ||||
| UPS | None | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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