Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Chandler, United States
Available date: Currently Available
· Hardware Components
DESCRIPTION | SUPPLIER PARTNO. |
SYSTEM CONTROLLER (i.e. BIOS, computer) |
|
Main Operation Controller | CX5000 |
|
|
SYSTEM SUBCOMPONENTS (subcontrollers, flowmeters, etc.) |
|
Sub Operation Controller | KDSC-2005SUBDISP |
DDC Temperature Controller | CQ1720 |
CQ1720-EA | |
Process ModuleController (PMC) | PMC5000 |
Gate Drive Unit | DN-150VR |
Wafer Handling Controller | RoBo5000 |
Valve / Interlock Control Unit | CJ1 series |
Signal Tower(Front) | WEP-302-RYG |
Signal Tower(Rear) | MES-302A-RYG |
Trans (Heater) | NS3Q148KAIUL |
Trans (Controller) | NS1Q005KADUL |
Trans (Clean Unit) | NS1Q020KAGUL |
Safety Relay Unit | G9SA-301 |
Power Box Assembly | # D5CP46047 |
· Standard Options
DESCRIPTION | SUPPLIER PARTNO. |
Cartridge Heater | D4EX22250 |
D7EX40096 | |
T/C for Heater Control | D4EX25492 |
D4EX34581 | |
T/C for Overtemperature Protection | D4EX25492 |
D4EX34581 | |
5-P T/C for ProfileControl | D7EX38668 |
1-P T/C for ProfileControl | D4EX21001 |
Thyristor Unitfor Control | SKKT160L5Z4F-HKD |
Clean Module Unit | BV-R14TF2G1Ｈ |
Clean Module Unit | BV-R14TZ2G9G |
Clean Module Unit | PCF-4EKD3750 |
Clean Module Unit | PCF-8EKD3796 |
· Standard Options (Continued)
DESCRIPTION | SUPPLIER PARTNO. |
I/O SHUTTER | D1CN19792 |
AGV/PGV/OHT STAGE | D5CN54940 |
FOUP LOADER | D5CP36632 |
ROTATION FOUP STORAGE | D5CP08396 |
FOUP OPENER | D5CP29415 |
WAFER DETECTION | D5CN59963 |
WAFER TRANSFER | D5CP42026 |
VARIABLE WAFER PITCHCONVERTER | D5CP23384 |
BOAT ELEVATOR | D5CP36853 |
FURNACE PORT SHUTTER | |
BOAT ROTATION | D7CX42373 (RoHS) |
Lip Inlet Flange | D5CP64136 |
GAS SYSTEM | SUPPLIER PARTNO. |
Gas Unit (IGS) | D7VP49035 D7VP55406 |
Tape Heaterfor gas pipe | ----- |
Air Cooling Unit | ----- |
EXHAUST SYSTEM | SUPPLIER PARTNO. |
Vacuum Sensor(VG11) | 631C13T8FH |
Vacuum Sensor(VG12) | 722B12TCE2FA |
Vacuum Sensor(VG13) | 631C11T8FH |
Vacuum Sensor(VG14) | 631C11T8FH |
Vacuum SensorMonitor | 660B30 |
Main Valve | VEC-SHA8-X0340 |
Exhaust Piping | ----- |
Exhaust Dilution Line | ----- |
Reactor TubePress Leak Line | ----- |
Tape HeaterFor Exhaust Line | ----- |
Jacket Heaterfor Exhaust Pipe | ----- |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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