Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Chandler, United States
Available date: Currently Available
Hardware Components
DESCRIPTION
SUPPLIER PARTNO.
SYSTEM CONTROLLER (i.e. BIOS, computer)
Main Operation Controller
CX5000
SYSTEM SUBCOMPONENTS (subcontrollers, flowmeters, etc.)
Sub Operation Controller
KDSC-2005SUBDISP
DDC Temperature Controller
CQ1720
CQ1720-EA
Process ModuleController (PMC)
PMC5000
Gate Drive Unit
DN-150VR
Wafer Handling Controller
RoBo5000
Valve / Interlock Control Unit
CJ1 series
Signal Tower(Front)
WEP-302-RYG
Signal Tower(Rear)
MES-302A-RYG
Trans (Heater)
NS3Q148KAIUL
Trans (Controller)
NS1Q005KADUL
Trans (Clean Unit)
NS1Q020KAGUL
Safety Relay Unit
G9SA-301
Power Box Assembly
# D5CP46047
· Standard Options
DESCRIPTION
SUPPLIER PARTNO.
Cartridge Heater
D4EX22250
D7EX40096
T/C for Heater Control
D4EX25492
D4EX34581
T/C for Overtemperature Protection
D4EX25492
D4EX34581
5-P T/C for ProfileControl
D7EX38668
1-P T/C for ProfileControl
D4EX21001
Thyristor Unitfor Control
SKKT160L5Z4F-HKD
Clean Module Unit
BV-R14TF2G1Ｈ
Clean Module Unit
BV-R14TZ2G9G
Clean Module Unit
PCF-4EKD3750
Clean Module Unit
PCF-8EKD3796
· Standard Options (Continued)
DESCRIPTION
SUPPLIER PARTNO.
I/O SHUTTER
D1CN19792
AGV/PGV/OHT STAGE
D5CN54940
FOUP LOADER
D5CP36632
ROTATION FOUP STORAGE
D5CP08396
FOUP OPENER
D5CP29415
WAFER DETECTION
D5CN59963
WAFER TRANSFER
D5CP42026
VARIABLE WAFER PITCHCONVERTER
D5CP23384
BOAT ELEVATOR
D5CP36853
FURNACE PORT SHUTTER
D7CP54604
BOAT ROTATION
D7CX42373 (RoHS)
Lip Inlet Flange
D5CP64136
GAS SYSTEM
SUPPLIER PARTNO.
Gas Unit (IGS)
D7VP49035 D7VP55406
Tape Heaterfor gas pipe
-----
Air Cooling Unit
-----
EXHAUST SYSTEM
SUPPLIER PARTNO.
Vacuum Sensor(VG11)
631C13T8FH
Vacuum Sensor(VG12)
722B12TCE2FA
Vacuum Sensor(VG13)
631C11T8FH
Vacuum Sensor(VG14)
631C11T8FH
Vacuum SensorMonitor
660B30
Main Valve
VEC-SHA8-X0340
Exhaust Piping
-----
Exhaust Dilution Line
-----
Reactor TubePress Leak Line
-----
Tape HeaterFor Exhaust Line
-----
Jacket Heaterfor Exhaust Pipe
-----
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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