Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Chandler, United States
Available date: Currently Available
· Hardware Components
DESCRIPTION | SUPPLIER PARTNO. |
SYSTEM CONTROLLER (i.e. BIOS, computer) |
|
Main Operation Controller | CX5000 |
|
|
SYSTEM SUBCOMPONENTS (subcontrollers, flowmeters, etc.) |
|
Sub Operation Controller | KDSC-2005SUBDISP |
DDC Temperature Controller | CQ1720 |
Process ModuleController (PMC) | PMC5000 |
Gate Drive Unit | DN-150VR |
Wafer Handling Controller | RoBo5000 |
Valve / Interlock Control Unit | CJ1 series |
Signal Tower(Front) | WEP-302-RYG |
Signal Tower(Rear) | MES-302A-RYG |
Trans (Heater) | NS3Q148KAIUL |
Trans (Controller) | NS1Q005KADUL |
Trans (Clean Unit) | NS1Q020KAGUL |
Safety Relay Unit | G9SA-301 |
· Standard Options
DESCRIPTION | SUPPLIER PARTNO. |
Cartridge Heater | D4EX22250 |
T/C for Heater Control | D4EX25492 |
T/C for Over temperature Protection | D4EX25492 |
5-P T/C for ProfileControl | D7EX38668 |
1-P T/C for ProfileControl | D4EX21001 |
Thyristor Unitfor Control | SKKT160L5Z4F-HKD |
Clean Module Unit | BV-R14TF2G1Ｈ |
Clean Module Unit | BV-R14TZ2G9G |
Clean Module Unit | PCF-4EKD3750 |
Clean Module Unit | PCF-8EKD3796 |
I/O SHUTTER | D1CN19792 |
AGV/PGV/OHT STAGE | D5CN54940 |
FOUP LOADER | D5CP36632 |
ROTATION FOUP STORAGE | D5CP08396 |
FOUP OPENER | D5CP29415 |
WAFER DETECTION | D5CN59963 |
WAFER TRANSFER | D5CP42026 |
VARIABLE WAFERPITCH CONVERTER | D5CP23384 |
BOAT ELEVATOR | D5CP36853 |
FURNACE PORTSHUTTER | D5CP55081(Flat Top) |
BOAT ROTATION | D7CX42373(RoHS) |
Lip Inlet Flange | D5CP54727 |
· Standard Options (Continued)
GAS SYSTEM | SUPPLIER PART NO. |
Gas Unit (IGS) | D7VP54935 |
Tape Heater forgas pipe | ----- |
Air Cooling Unit | ----- |
EXHAUST SYSTEM | SUPPLIER PART NO. |
Vacuum Sensor (VG11) | 631C13T8FH |
Vacuum Sensor (VG12) | 722B12TCE2FA |
Vacuum Sensor (VG13) | 631C11T8FH |
Vacuum Sensor (VG14) | 631C11T8FH |
Vacuum Sensor Monitor | 660B30 |
Main Valve | VEC-SHA8-X0340 |
Exhaust Piping | ----- |
ExhaustDilution Line | ----- |
ReactorTube Press LeakLine | ----- |
Tape Heater ForExhaust Line | ----- |
Jacket Heater for Exhaust Pipe | ----- |
N2 PURGE LOADLOCK | SUPPLIER PART NO. |
O2 Monitor / Detector | TF-21D201 |
OTHER | SUPPLIER PARTNO. |
Lamp for loading area | NF01091-60HZ(or 50HZ) |
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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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