Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2024-02-27
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| Original Ship Date from OEM | 2024.06.20 | |||
| Software Version | Window11 Base | |||
| Firmware Version | 24H2 | |||
| Date of Last PM | 2025.04.27 | |||
| Is System On-Line? | Yes | |||
| Off-Line Date (if applicable) | N/A | |||
| CE Mark Certified? | No | |||
| OEM Audit Available? | Yes | |||
| Decontamination Report Exists? | Yes | |||
| Can Produce Wafers AS IS? | Yes | |||
| Any Known Field Modifications? | No | |||
| All Cables Present? | Yes | |||
| Electrical Requirements | 208v 3-Phase 75A | |||
| System Configuration | System Type | |||
| AS1 Platform | AS1-R1 | |||
| Clean Room Manuals | Yes | |||
| Standard Manuals | Yes | |||
| Number of Cassettes | 2 | |||
| Load Type | AGV | |||
| Install Type | Cluster | |||
| Mini-Environment | N/A | |||
| Robot Type | 3-axis controlled | |||
| Endpoint Detection Type | N/A | |||
| SECS/GEMS | Yes | |||
| Ozone/Microwave Generator Details | ||||
| Chamber Position | Mfgr. | Model | ||
| 1 | MKS | FI20160-1 | ||
| 2.45Ghz/3KW | ||||
| 2 | MKS | FI20160-1 | ||
| 2.45Ghz/3KW | ||||
| Main Etch Chamber Pump | Complete All | |||
| Manufacturer | N/A | |||
| Model | N/A | |||
| Quantity Required | 2 | |||
| Included With System | No | |||
| Chiller Information | Complete All | |||
| Manufacturer | N/A | |||
| Model | N/A | |||
| # of Cooling Channels | N/A | |||
| Quantity Required | N/A | |||
| Included With System | N/A | |||
| Gas Line | Gas | Flow (sccm) | MFC | MFC |
| # | Mfgr. | Model | ||
| 1 | O2 | 3000 | Aera | FC-2902V |
| 2 | N2 | 450 | Aera | FC-2902V |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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