Macquarie Semiconductor and Technology on behalf of Confidential Seller
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Rapid Thermal Processing (RTP) Equipment
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
MPT RTP-600xp
|
11/21/2025 | |
|
Fab Equipment ID |
RTA 6 |
|
Manufacturer (Make) |
Modular Process technology Corp. |
|
Model |
RTP600XP |
|
Serial Number |
95369 |
|
Wafer Size (inches) |
4 , 5, 6 |
|
OEM MFG Date |
Jul-09 |
|
Install Date |
7/27/2009 |
|
Date of Last PM |
7/15/2024 |
|
Is System On-Line? |
No |
|
Off-Line Date (if applicable) |
8/11/2024 |
|
Can Produce Wafers As-Is ? |
Yes |
|
Are any Manuals included ? |
Yes |
|
OEM Audit Available? |
No |
|
3rd Party Audit Available ? |
No |
|
Decontamination Report Exists? |
No |
|
Any Field Modifications ? |
No |
|
All Cables present ? |
Yes |
|
Any Corrosion visible on modules ? |
No |
|
Any Missing / Damaged Parts? |
No |
|
Shipping Brackets Included ? |
NO |
|
Wafer Handler |
No |
|
Pre-Aligner ? |
No |
|
Mini-Environment |
No |
|
System SW (OS) version |
Windows 2000 Professional |
|
System SW (App) version |
RTP600XP Version 3.2 |
|
Log-In User Name |
Engineer |
|
Log-In Password |
Allwin06 |
|
GEM / SECS ? |
YES |
|
Ethernet |
YES |
|
AC Dist Box |
YES |
|
Heat Exchanger / Chiller |
YES |
|
CDA |
YES |
|
DIW |
NO, Distilled water is recommended |
|
Vacuum |
No |
|
Gas |
YES, Ar, N2 |
|
Power |
208 VAC |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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