Macquarie Semiconductor and Technology on behalf of Confidential Seller
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Rapid Thermal Processing (RTP) Equipment
Date of Manufacture: 2020-01-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
Centrotherm Rapid 200 Single Chamber
|
Date of Audit |
9/19/2025 |
|
Fab Equipment ID |
RAPID003 |
|
Manufacturer (Make) |
Centrotherm |
|
Model |
c.RAPID 200 |
|
Serial Number |
87986 |
|
Wafer Size (inches) |
6 |
|
Install Type: TTW / Stand-Alone |
Either |
|
OEM MFG Date |
2020 |
|
Install Date |
2020 |
|
Date of Last PM |
TBD |
|
Is System On-Line? |
YES |
|
Off-Line Date (if applicable) |
11/5/2025 |
|
Can Produce Wafers As-Is ? |
YES |
|
CE Mark Certified ? |
YES |
|
Are any Manuals included ? |
STD |
|
OEM Audit Available? |
NO |
|
3rd Party Audit Available ? |
NO |
|
Decontamination Report Exists? |
YES |
|
Overall Tool Condition | |
|
Any Field Modifications ? |
NO |
|
All Cables present ? |
YES |
|
Any Corrosion visible on modules ? |
NO |
|
Any Missing / Damaged Parts ? |
NO |
|
Shipping Brackets Included ? |
NO |
|
Handler Type |
150mm Cassette in 200mm EFEM |
|
# of Cassette / FOUP Loaders |
2 |
|
Robot Type |
OEM |
|
End-Effecter Type |
150mm |
|
Pre-Aligner ? |
YES |
|
Mini-Environment |
NO |
|
Handler Options ? | |
|
System Software | |
|
System SW (OS) version |
OEM |
|
System SW (App) version |
OEM |
|
Log-In User Name |
OEM |
|
Log-In Password |
OEM |
|
GEM / SECS ? |
Yes |
|
HSMS |
Yes |
|
Supporting Equipment | |
|
Power Supply |
400V or 480V |
|
AC Dist Box |
No |
|
Ext Transformer |
Not needed |
|
UPS |
Yes |
|
Heat Exchanger / Chiller |
Option |
|
Backing Pump(s) |
Yes |
|
Facility Requirements | |
|
CDA |
Yes |
|
DIW |
No |
|
Vacuum |
Yes |
|
Gas |
Yes |
|
Power |
400V or 480V |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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