Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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Rapid Thermal Processing (RTP) Equipment
Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
1.
3. Wafer size: 150mm
Wafer handling: Other
Bar code reader? Yes
4. Software version: MCS 2.18__
Computer type: Linux_
SECS/GEM interface? Yes__
5. Lamp type: Tungsten-Halogen__
6. Wafer handling:
Robot type, model, s/n:
Type-Kawasaki Robot Dual arm , model-3NTS22A-RA04, S/N-NTS220218
Wafer holder material: SUS Body & QUARTZ
Indexer type: NO
Pre-aligner/centering station present? YES
Single wafer preheat dummy station present? YES
7. Temperature monitor/control mechanism: fast response optical pyrometer system
8. Utilities:
Oxygen sensor in vent line? YES
UPS power supply? YES
9. Liner option for BPSG? NO 10. Ex-situ reflectometer? NO
11. Number of MFC-controlled gas lines? TWO
MFC description:
MFC title | Make | Gas | Flow |
N2 | Brooks | N2 | 300SLM |
N2 | Brooks | N2 | 50SLM |
O2 | Brooks | O2 | 200SLM |
LO-O2 | Brooks | O2 | 10SLM |
AR | Brooks | AR | 100SLM |
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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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