Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
Tool
Manufacturer: AMAT Model: Sem Vision G4 Max Wafer Size: 300mm
Technical specifications Illumination mode: E-Beam 4nm resolution at 1kV
Thermo Noran EDX spectrometer
Automatic defect review and classification capability Supports 8" and 12" wafers
Multi perspective imaging (3 perspectives)
EDX and Imaging accelerating voltage from 500V to 15kV SEM AutoFocus
Sony 990 CCD
Optical video Image 2.5x, 20x and 100x
Equipment
Vacuum chamber
Three Wafer tilt positions. 0, 15 and 45 degrees SGI hard drive size: 72GB
Roughing pump stack: Edwards IDQP40 and IDQP80 (subject to availability) Fully SECS 2 compatible
Two Brooks automation fixed load load ports
EDX capability requires cryogenic compressor (subject to availability)
Operator Interface
SGI (main computer) uses IRIX by silicon graphics EDX uses Sun Sparc5 Solaris Operating system MEC (for E-Beam gun) uses Windows NT
WHC (Wafer handling) uses Windows NT Image Computer uses Windows NT Supports NFS (network file sharing) Application Software 5.0.430 compatible
Tool used in a copper manufacturing process.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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