Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 150mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Wafer Size: 150mm
· System safely transfers reticle between 3 different reticle boxes: RSP, blank and shipping boxes
· Four main modules: BBO, CSO, SCARA, and Utility module
· SCARA module:
o Centralized mask handling SCARA robot
o Handoff station
o Environment control: two fan filter units (FFU’s), two ionizing bars, and three static tips for measuring ambient air pressure
· BBO (blank box opener) module: removes box lid, rotates the box 90degress to present mask to SCARA robot, and has its own environmental control
o Automation partition door
o Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure
· CSO (Clam Shell opener) module: open lid of clam shell type shipping removes box lid, present mask to SCARA robot, and has its own environmental control
o Automation partition door
o Environment control: single FFU, ionizer bar, yellow filtered utility light, operator access door with interlocking switch, electro-magnetic locks, two static tips for measuring ambient air pressure
· Utility module: Houses all system electronics, pneumatics, and vacuum distribution. Fully partitioned from mask handling operations and so maintains only fab ambient pressure and cleanliness
o AC power distribution
o Controllers: SCARA robot controller, BBO controller, pneumatics/vacuum distribution
o PC
o HMI differential pressure gauge (w/ switch and two diff. pressure switches)
· In addition, Lamina 203 system is equipped with front light tower, front/back/side EMO, and ON/OFF buttons.
· System control via touch screen (GUI) mounted on the system, or by remote HSMS communication.
· Additional details available upon request
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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