Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Reticle/Mask Defect Inspection System
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Factory Interface (FI) with 1 loadport for SMIF pod RSP-200
· Separate electronic cabinets reduce footprint of main tool and separates heat generation sources.
· Separate pre climatization unit to supply conditioned air for main chamber environment control.
· Operator desk with dual monitors for simultaneous view of tool PC and station controller.
· Transfer Chamber
o 6 axis external handling robot for moving masks from loadport to library to internal handling systems
o Internal handling robot interfaces with fine alignment station for accurate mask edge detection.
o Mask library can accommodate 10 masks within the tool at any time.
· Process Chamber
o Temperature and humidity controlled chamber
o Ultra precision stage for measuring mask in face up position.
o Stage rests on advanced damping devices to achieve optimal registration repeatability.
· Imaging optics
o 193nm excimer source with a 25um field of view capable of registration measurements in both reflection and transmission mode
o Capable of through pellicle measurements for optical masks.
o Red vis camera for coarse alignment and mask position measurements.
o Measurement speed is 600 sites per hour with 5 plane measurements and up to 1000 sites per hour with 1 plane measurement
· Performance for both reflection and transmission mode measurements:
o Long term registration repeatability of < 0.55nm with first order corrections and <0.8nm with 0th order corrections
o Registration accuracy < 0.95nm
o Screen linearity < 1nm
o Centrality repeatability <10um
· Additional details available upon request
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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