Macquarie Semiconductor and Technology on behalf of Intel Ireland Ltd.
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Leixlip, Ireland
Available date: Currently Available
· Laser: Argon Ion Laser, wavelength=363.8nm
· NA = 0.78 (150nm pixel)
· Inspection Pixel Size: 250nm and 375nm
· Algorithm: STARlight TR
· Basic Function:
o Show new defects function
o Automatic defect categorization
o Automatic reticle re-inspection
o Batch inspection
· Fast Scan Mode: Increase system TPT (scan time) with PSL capture rate of 95%. TPT=45min for 250nm pixel size. TPT=22min for 375nm pixel size.
· Signal Tower
· 9GB Hard disk
· Software: V4.1.5 or newer (License not included)
· Offline View Capability: Defect image transfer to remote server and can be viewed with compatible image viewer
· URSA: For inspection of top pellicle and back side glass
· Tri-tone PSM Inspection Capability: for inspection of PSM with chrome, half-tone material (such as MoSiOxNx) and Quartz in the inspection area.
· OPC Inspection Capability: for inspection of aggressive OPC or small line-width reticles
· Nikon Box Full Autoloader: Automatic removal/insertion of reticles from/into standard Nikon boxes.
· Nikon Box 10-slot 6” Magazine: Autoloader magazine for 6"x6" thick Nikon boxes.
· SVGL Box Full Autoloader Upgrade (subject to availability): Automatic removal/insertion of reticles from/into standard SVGL boxes.
· Other options may be available (inquire):
o 186nm inspection pixel
o Electronic Classification Station (ECS)
o Off-line Setup: enabling offline creation/editing of recipes using ECS
o 9x Defect Data Server: for recipe, results, and image storage
o X-Link with R2W or R2R for 9x: Outputs inspection results in Wafer KLARF or Reticle KLARF formats.
o VSS Printability Simulator for 9x: Simulates defect printability from inspection images in Reticle KLARF
o Networked Graphics Printer and/or Color Defect Image Printer
· Additional details available upon request
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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