Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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PVD (Physical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Incoming
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Factory Interface: 4.0
· (2) 25-wafer FOUP Loadports
· PVD Endura Type Controller
· PVD Endura Type Remote Generator Rack
· Cryo Compressor
· Thermo Neslab Heat Exchanger
· Edwards iQDP80/IQMB250 pump systems for loadlock, system, and process chambers (pumps may not be included)
· CE Mark
| WW Intro / 1st Sys | |||
| Module | Level | Part Desc | |
| FI | Top | Top | 5.3 FI |
| FI | Top | Loadport (LP) | N2 x2 |
| FI | Details | FI Aligner | High Friction |
| FI | Details | S/W | CGA SW / CGAfe only for Gen 4.0+ |
| FI | Details | Server | Gen 3.2.1 / Gen 4.0 (After 7/31/18) |
| MF | Top | Top | P4 MF w/ XP robots |
| MF | Details | Motion control type | eXMP |
| MF | Details | Servo Driver Type | ATD |
| MF | Details | MF Robot Blade | Opera2 Blades |
| MF | Details | P4 SWLL Fast Vent | Included |
| MF | Details | MF ladder | N/A |
| SWLL | Top | Top | MD SWLL |
| SWLL | Details | Defect package | Al Fins W/ Vespel Pins |
| SWLL | Details | Pumping | Dedicated pumping |
| SWLL | Details | Cooling (pedestal) | N/A |
| Ch E | Top | Top | Degas |
| Ch E | Details | Pedestal | Grooved |
| Ch E | Details | Defect package | Terminator (lift hoops & Celazole |
| fingers) | |||
| Ch E | Details | Lifter type | Motorized lifts |
| Ch F | Top | Top | Degas |
| Ch F | Details | Pedestal | Grooved |
| Ch F | Details | Defect package | Terminator (lift hoops & Celazole fingers) |
| Ch F | Details | Lifter type | Motorized lifts |
| Ch C | Top | Top | Empty |
| Ch D | Top | Top | Empty |
| Ch A | Top | Top | Pass through Ch |
| Ch A | Details | Pedestal | Celazole |
| Ch A | Details | Defect package | WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified |
| Ch A | Details | Lifter type | Motorized lifts (Endura HRR) |
| Ch A | Details | Pumping | N/A |
| Ch B | Top | Top | Cool down |
| Ch B | Details | Pedestal | Celazole |
| Ch B | Details | Defect package | WW16'2018: Terminator defectivity (Celazole pedestal and Vespel pin) package qualified |
| Ch B | Details | Lifter type | Motorized lifts (Endura HRR) |
| Ch B | Details | Pumping | WW 36' 2018: Dedicated pump |
| Ch 1 | Top | Top | Empty |
| Ch 2 | Top | Top | ALD |
| Ch 2 | Details | Pedestal | MCA |
| Ch 2 | Details | MFC | Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719. GF125 Fw 1.28 qualifiied on XDK719 |
| Ch 2 | Details | Process Kit | ALD2 TaN |
| Ch 2 | Details | Lid type | Six injector Lid Cap |
| Ch 2 | Details | Gas Panel (# ampoule, # sticks) | 1 - ampoule , 4 sticks; DMA gas stick |
| Ch 2 | Details | Ampoule Type | Std ampoule |
| Ch 2 | Details | Misc | Virtual Leak H/W |
| Ch 3 | Top | Top | ALD |
| Ch 3 | Details | Pedestal | MCA |
| Ch 3 | Details | MFC | Aera Pi980 / GW125 fw 1.28 in qual on F32 XDK719. GF125 Fw 1.28 qualifiied on XDK719 |
| Ch 3 | Details | Process Kit | ALD2 TaN |
| Ch 3 | Details | Lid type | Six injector Lid Cap |
| Ch 3 | Details | Gas Panel (# ampoule, # sticks) | 1 - ampoule , 4 sticks; DMA gas stick |
| Ch 3 | Details | Ampoule Type | Std ampoule |
| Ch 3 | Details | Misc | Virtual Leak H/W |
| Ch 4 | Top | Top | Empty |
| Ch 5 | Top | Top | N/A: No position 5 on P4 |
| Remotes | Top | Cryo compressor | IS-1000 MF Compressor (0190-54045) |
| FTF Compliant | Top | FTF | N |
| Remotes | Top | Equipment Rack Type/ Qty | Rev 3 / 1 |
| Remotes | Details | Fuse Box | SCCR 300 Amp |
| Remotes | Top | CVD/ Siconi H/X Qty / Type | 1 SMC H2000 (0190-53161) @ 60 Hz but also used at 50 Hz site. P/N: 0190-53162 for 50 Hz sites. |
| Remotes | Top | DI Cooler | 0190-54808 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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