Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)
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PVD (Physical Vapor Deposition)
Date of Manufacture: 2023-06-01
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| User ID: | TEST |
| Password: | TEST |
| Date of Last PM | |
| Is System On-Line? | Yes |
| CE Mark Certified? | Yes |
| OEM Audit Available? | No |
| Can Produce Wafers AS IS? | Yes |
| Any Known Field Modifications? | Yes |
| All Cables Present? | Yes |
| GEM/SECS Interface | Yes(SECS) |
| SECS II Interface | Yes |
| Standard Network Communication Capability | No |
| Machine Electricity | |
| Frequency | 60 Hz |
| Required Voltage | 400V |
| Need Transformer? | Yes |
| Key Common Options | Included? |
| Clean Room Manuals | No |
| Standard Manuals | No |
| Calibration Standards | No |
| Transport module Configuration | |
| Front Monitor | Trolley |
| Rear Monitor | Laptop |
| TM Type | GTM-OS |
| Load Lock Vacuum / Model | Turbo |
| HiPace300 | |
| AUX – Left | VX Aligner |
| AUX – Right | Single Gas Cool |
| AUX – Center | Blank |
| TM RGA | MV |
| PM1 Configuration | |
| ID | Heat |
| Platen | HT |
| Wafer Lift Ring | Std |
| Wafer Retainer | HT |
| RGA | No |
| PM2 Configuration | |
| ID | SE-LTX |
| Coil RF PSU | Paramount |
| Platen RF PSU | Paramount |
| Platen | SP – CrOx |
| Cooling | CDA |
| Chiller TX | N/A |
| Chiller Fluid | N/A |
| Chiller Hose | N/A |
| Pins | EC |
| MFC Type | MKS GE50A |
| Pump | Turbo / HiPace 700 |
| H2_MOD | No |
| RGA | No |
| PM3 Configuration | |
| Config | Std Dep |
| Platen RF PSU | RFA-600A |
| Platen | Std |
| Pins & BSR | Std |
| Cooling | CDA |
| Chiller TX | N/A |
| Chiller Fluid | N/A |
| Chiller Hose | N/A |
| Resistor Bank | Yes[Std] |
| Shutter | Yes / Standard |
| MFC Type | MKS GE50A |
| Pump | Sicera Cryopump |
| Throttle Valve | No |
| RGA | No |
| Target PSU | 20kW Ascent |
| Magnetron | Moving |
| Motor | Variable |
| HE Leak port | Yes |
| Lamp Bakeout | No |
| Hoist | Rev B MM |
| PM4,5,6 Configuration | |
| Config | Std Dep |
| Platen RF PSU | No |
| Platen | ITU |
| Pins & BSR | Std |
| Cooling | CDA |
| Chiller TX | N/A |
| Chiller Fluid | N/A |
| Chiller Hose | N/A |
| Resistor Bank | Yes[Std] |
| Shutter | No |
| MFC Type | MKS GE50A |
| Pump | Sicera Cryopump |
| Throttle Valve | No |
| RGA | No |
| Target PSU | 20kW Ascent |
| Magnetron | Standard |
| Motor | Variable |
| HE Leak port | Yes |
| Lamp Bakeout | Yes |
| Hoist | Rev B |
| Box 9 – Support Equipment | |
| Key Common Options | |
| Cyro Compressors | Yes |
| Manufacturer/Model | CSW-61 |
| Quantity | 2ea |
| Vacuum Pumps | Yes |
| Pump Type | Dry |
| Manufacturer/Model | Kasiyama |
| MU100 | |
| Quantity | 4ea |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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