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Endura II Aluminum Interconnect
PVD (Physical Vapor Deposition)
Date of Manufacture: 2006-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| MAINFRAME | CONFIGURATION | ||
| ELL MF | |||
| XP ROBOTS | |||
| STD BLADES | |||
| HT SWLL | |||
| FI ROBOT | YASAKAWA | ||
| FE COMPUTER | FES-GCA | ||
| FI COMPUTER | FIS-GCA | ||
| RT COMPUTER | RTS-GCA | ||
| LOADPORT | TDK 2 LOADPORTS | ||
| CRY PUMP | BROOKS CTI OBIS | ||
| CH 1, 2, 3, 4 | |||
| PROCESS | HP Al | MAGNET: 0010-03485 | |
| DC POWER | 40kW AE DC GENERATOR | ||
| HEATER | HIGH-TEMP, ESC (0010-27430) | ||
| CRYO PUMP | BROOKS CTI OBIS | ||
| CHAMBER BODY | SST | ||
| SHUTTER | YES | ||
| MISC | RGA MANUAL VALVE | ||
| ION GUAGE WITH PNUEMATIC VALVE | |||
| CGA COMPATIBLE DRIVERS | |||
| STEC Z500 MFC (2X) | |||
| CH A, B | COOLDOWN | ||
| CH C, D | |||
| PROCESS | VERSA TTN | MAGNET: 0010-04387 | |
| DC POWER | 20kW AE DC GENERATOR | ||
| HEATER | 300MM A101 (0010-27432) | ||
| CRYO PUMP | BROOKS CTI OBIS | ||
| CHAMBER BODY | SST | ||
| SHUTTER | YES | ||
| MISC | RGA MANUAL VALVE | ||
| ION GUAGE WITH PNUEMATIC VALVE | |||
| CGA COMPATIBLE DRIVERS | |||
| STEC Z500 MFC (3X) | |||
| CH E, F | |||
| PROCESS | DEGAS | ||
| TYPE | SMD | ||
| CRYO PUMP | BROOKS CTI OBIS | ||
| REMOTES | LOADCENTER 440V/208V | ||
| 50/60Hz | |||
| AC RACK | 1X | ||
| EQUIPMENT RACK | 2X | ||
| CRYO COMPRESSOR | 2X | ||
| ADDITIONAL CRYO COMPRESSOR | 1X | ||
| CHILLER | DI MAX CHILLER, 1X | ||
| IPUP | 1X (SHARED FOR 2X SWLL) | ||
| CABLE | 50' TO 75' | ||
| PROCESS KIT | HP Al | ||
| DS TTN | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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