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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2014-02-01
Currently Configured for: 150mm
Current Equipment Status: Available
Location of Equipment: Bucheon, Korea, Republic of
Available date: Currently Available
| Install Type | Cluster | |||
| Original Ship Date from Lam | 2024.06.10 | |||
| Software Type | Lam Envision | |||
| Date of Last PM | 2024.11.15 | |||
| Is System On-Line? | No | |||
| Off-Line Date (if applicable) | 2025.04.03 | |||
| CE Mark Certified? | No | |||
| SECS Interface | Yes | |||
| Electrical Requirements | 208v 3-Phase 250A (RPM) | |||
| OEM Audit Available? | No | |||
| Decontamination Report Exists? | No | |||
| Can Produce Wafers AS IS? | No | |||
| Any Known Field Modifications? | No | |||
| All Cables Present? | Yes | |||
| Gas Panel Type | Standard / CES | |||
| Etcher Mainframe Type | Select One | |||
| Alliance A4 | Yes | |||
| System Configuration | Chamber Type | |||
| SETCP39 | 9400SE | |||
| SETCP40 | 9400DFM | |||
| SETCP41 | 9400DFM | |||
| 9400SE, 9400DFM | Poly Etch | |||
| Key Common Options | Included? | |||
| Signal Lamp Tower | Yes | |||
| Bolt-On-SMIF | No | |||
| Built-In SMIF | No | |||
| Load port Make/Model | Assembly Lip Seal Drive, VCE4 / LAM | |||
| Clean Room Manuals | Yes | |||
| Standard Manuals | Yes | |||
| Remote Operator Interface | Yes | |||
| Key Alliance Mainframe Items | ||||
| Equipe Autoloader | Yes | |||
| Built-In Hepa Filter | No | |||
| Orbitally Welded Gas Box | Yes | |||
| Backside Helium Cooling | Yes | |||
| Helium Cooling MFC Type | UPC | |||
| Heated Pumping Manifolds | Yes | |||
| On-Board RF Generators | Yes | |||
| Remote RF Cart | No | |||
| Remote Gas Box | Yes | |||
| Main On-Board AC Distribution Type | Circuit Breaker | |||
| Remote AC Box | Yes | |||
| WVDS | N/A | |||
| DSQ Type | N/A | |||
| Hine 38A Indexers | No | |||
| Endpoint Detection System | Yes | |||
| Endpoint Type | IEP | |||
| Endpoint Lam Part Number | SD1024 | |||
| Photodiode Wavelength(s) | N/A | |||
| Chamber Liner Present | Yes | |||
| Chamber Anodization Condition | Normal | |||
| Electrode Gap | Fixed Gap | |||
| Wafer Clamp | ESC | |||
| ESC Type | UNIPOLAR | |||
| Gate Valve Mfg, Model/Type | ASSY,GATE DRIVE,ALLI 6 /LAM | |||
| TCP Coil Size | 6” | |||
| Key Alliance Mainframe Items | ||||
| Robot Type | 3-axis controlled | |||
| Robot Part Number | MAG7 (brooks) | |||
| VCE Model | VCE 4 | |||
| VCE SMIF Ready (cassette platforms extend to received cassettes from LPIs) | No | |||
| Front Skins SMIF Ready (cutouts & latch hardware) | No | |||
| RPM (Remote Power Module) | Yes | |||
| Key Alliance Chamber Items | ||||
| PM1 – Endpoint Type | IEP | |||
| PM1 – Endpoint Lam Part Number | SD1024 | |||
| PM1 – Wafer Clamping Method | ESC | |||
| PM1 – Gate Valve Mfg. Model/Type | ASSY,GATE DRIVE,ALLI 6 /LAM | |||
| PM1 – Chamber Anodization Condition | Normal | |||
| PM1 - VCI Installed | No | |||
| PM1 – TCP Coil Size | 6” | |||
| PM2 – Endpoint Type | IEP | |||
| PM2 – Endpoint Lam Part Number | SD1024 | |||
| PM2 – Wafer Clamping Method | ESC | |||
| PM2 – Gate Valve Mfg. Model/Type | ASSY,GATE DRIVE,ALLI 6 /LAM | |||
| PM2 – Chamber Anodization Condition | Normal | |||
| PM2 - VCI Installed | No | |||
| PM2 – TCP Coil Size | 6” | |||
| PM3 – Endpoint Type | IEP | |||
| PM3 – Endpoint Lam Part Number | SD1024 | |||
| PM3 – Wafer Clamping Method | ESC | |||
| PM3 – Gate Valve Mfg. Model/Type | ASSY,GATE DRIVE,ALLI 6 /LAM | |||
| PM3 – Chamber Anodization Condition | Normal | |||
| PM3 - VCI Installed | No | |||
| PM3 – TCP Coil Size | 6” | |||
| Turbo Pump Details | ||||
| Chamber Position | Turbo Mfgr. | Turbo Model | ||
| PM 1 / Main Chamber | Alcatel | ATH1600M | ||
| PM 2 / Main Chamber | Alcatel | ATH1600M | ||
| PM 3 / Main Chamber | Alcatel | ATH1600M | ||
| RF Generator Details | ||||
| Chamber Position | Mfgr. | Model | ||
| PM 1 / Top | AE | RFG1250 | ||
| PM 1 / Bottom | AE | RFG1250HALO | ||
| PM 2 / Top | AE | 3156312-161(Paramount) | ||
| PM 2 / Bottom | AE | 3156312-160(Paramount) | ||
| PM 3 / Top | AE | 3156312-161(Paramount) | ||
| PM 3 / Bottom | AE | 3156312-160(Paramount) | ||
| LVCE,RVCE or TM Pump | ||||
| Manufacturer | Edwards | |||
| Model | IXM200 | |||
| Included With System | Yes | |||
| Main Etch Chamber Pump | ||||
| Manufacturer | Edwards | |||
| Model | IXM200 | |||
| Quantity Required(PM1,2,3) | 3 | |||
| Included With System | Yes | |||
| Chiller Information | Complete All | |||
| Manufacturer | Cell-Vit | |||
| Model | COEN1102UZN | |||
| Machine Hours | 29004 | |||
| Electrical Requirements | 208v 3-Phase 60A | |||
| # of Cooling Channels | One | |||
| Quantity Required | 3 | |||
| Included With System | Yes | |||
| Gas Box Configuration | ||||
| Gas Box Model | ||||
| Lam Part Number | ||||
| Maximum Number of Gas Lines | Enhanced (12) | |||
| Gas | Gas | Flow (sccm) | MFC Mfgr. | MFC Model |
| Line # | ||||
| 1 | CL2 | 200 | Brooks | GF125CXXC |
| 2 | HBR | 500 | Brooks | GF125CXXC |
| 3 | SF6 | 200 | Brooks | GF125CXXC |
| 4 | O2 | 100 | Brooks | GF125CXXC |
| 5 | HE | 1000 | Brooks | GF125CXXC |
| 6 | CF4 | 200 | Brooks | GF125CXXC |
| 7 | AR | 500 | Brooks | GF125CXXC |
| 8 | O2 | 30 | Brooks | GF125CXXC |
| 9 | N2 | 100 | Brooks | GF125CXXC |
| 10 | SF6 | 25 | Brooks | GF125CXXC |
| 11 | CL2 | 200 | Brooks | GF125CXXC |
| 12 | C3F8 | 300 | Brooks | GF125CXXC |
| 13 | BACK HE | 50 | UNIT | UPC-8130 |
| Chiller Controller (COEN1102UZN 3 Unit) | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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