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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2012-03-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| Date of Audit | July 2025 | |
| Serial Number | ESS00013 / FC0333 | |
| OEM Model Number | TAC 3MMZZMZ | |
| Wafer Size (inches) | 12 | |
| Number of Cassette/FOUP Positions | 5 | |
| Original Ship Date from TEL | March 2012 | |
| Software Version | Ver 3.15 rev 503 | |
| Date of Last PM | June 23 | |
| Is System On-Line? | No | |
| Off-Line Date (if applicable) | November 2023 | |
| CE Mark Certified? | No | |
| OEM Audit Available? | No | |
| Decontamination Report Exists? | No | |
| Can Produce Wafers AS IS? | No | |
| Any Known Field Modifications? | No | |
| All Cables Present? | Yes | |
| Electrical Requirements | 208 165A | |
| Process Chamber (P/C) 1 | RLSA | |
| Process Chamber (P/C) 2 | RLSA | |
| Process Chamber (P/C) 3 | No Chamber | |
| Process Chamber (P/C) 4 | No Chamber | |
| P/C 5 – Tactras Only | RLSA | |
| P/C 6 – Tactras Only | SCCM Poly T4 | |
| TEL RLSA process : Ox, SiN, Poly, | ||
| Spacer, Contact, HARC, SAC | ||
| Chamber Position | Turbo Mfgr. | Turbo Model |
| Transfer Chamber | X | X |
| Position 1 | Shimadzu | FT2301D |
| Position 2 | Shimadzu | FT2301D |
| Position 5 | Shimadzu | FT2301D |
| Chamber Position | Mfgr. | Model |
| Position 1 – Lower RF | DAIHEN | RGA-20C-V |
| Position 1 – Upper RF (SCCM) | MKS | MKS-050B04-PS-V |
| Position 2 – Lower RF | DAIHEN | RGA-20C-V |
| Position 2 – Upper RF (SCCM) | MKS | MKS-050B04-PS-V |
| Position 5 – Lower RF | DAIHEN | RGA-20C-V |
| Position 5 – Upper RF (SCCM) | MKS | MKS-050B04-PS-V |
| Position 6 – Lower RF | DAIHEN | RGA-10 |
| Position 6 – Upper RF (SCCM) | DAIHEN | AGA-27 |
| Etch Chamber Pump | ||
| Manufacturer | Edwards | |
| Model | iGX600M | |
| Quantity Required | 4 | |
| Included With System | No | |
| Transfer Chamber Pump | ||
| Manufacturer | Edwards | |
| Model | EPX 180LE | |
| Included With System | Yes |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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