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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2009-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
| Date of Audit | 7/31/2025 | |||
| Serial Number | 123946 | |||
| Wafer Size (inches) | 12 | |||
| Number of Cassette / FOUP Positions | 3 | |||
| Loadport Make/Model | Brooks | |||
| Software Version | Windows 10 | |||
| Date of Last PM | N/A | |||
| Is System On-Line? | No | |||
| CE Mark Certified? | Yes | |||
| SECS II Interface | Yes | |||
| Electrical Requirements | 208v, 3ph, 400A to mainframe, 208v, 3ph, 225A to RPDB | |||
| Can Produce Wafers AS IS? | Yes | |||
| Any Known Field Modifications? | Yes (iLon600) Upgrade | |||
| All Cables Present? | Yes | |||
| Etcher Mainframe Type | Select One | |||
| 2300 Version 2 | Yes | |||
| System Configuration | ||||
| Chamber Type | Vintage | Serial Number | ||
| PM 2 | Kiyo 45 | 2009 | 23K45-982(F123946-PM2) | |
| PM 3 | Kiyo 45 | 2009 | 23K45-983(F123946-PM3) | |
| PM 4 | Kiyo 45 | 2009 | 23K45-984(F123946-PM4) | |
| Key Common Options | Included? | |||
| Signal Lamp Tower | Yes | |||
| Key Mainframe Items | ||||
| Robot Type | Brooks | |||
| Robot Part Number | ATR8 | |||
| Mag 7 | ||||
| OHT Configured (300mm Only) | Yes | |||
| Key Chamber Items | ||||
| PM2 – Endpoint Type | LSR w/ OES | |||
| PM3 – Endpoint Type | LSR w/ OES | |||
| PM4 – Endpoint Type | LSR w/ OES | |||
| Turbo Pump Details | ||||
| Chamber Position | Turbo Mfgr. | Turbo Model | ||
| PM 1 | ||||
| PM 2 | Edwards | STP-XA2703CV | ||
| PM 3 | Edwards | STP-XA2703CV | ||
| PM 4 | Edwards | STP-XA2703CV | ||
| RF/Microwave Generator Details | ||||
| Chamber Position | Mfgr. | Model | ||
| PM 2 | APEX | 3156110-213 | ||
| PM 2 | APEX | 3156110-214 | ||
| PM 3 | APEX | 3156110-213 | ||
| PM 3 | APEX | 3156110-214 | ||
| PM 4 | APEX | 3156110-213 | ||
| PM 4 | APEX | 3156110-214 | ||
| Loadlock Pump | ||||
| Manufacturer | Edwards | |||
| Model | IPX | |||
| Included With System | Yes | |||
| Main Etch Chamber Pump | ||||
| Manufacturer | Edwards | |||
| Model | IXM600M | |||
| Quantity Required | 3 | |||
| Included With System | No | |||
| Chiller Information | ||||
| Manufacturer | Maruyama | |||
| Model | eYR8030SC(LN) | |||
| Machine Hours | 0 | |||
| Electrical Requirements | 208v, 3ph, 30A | |||
| # of Cooling Channels | One | |||
| Quantity Required | 3 | |||
| Included With System | No | |||
| Gas Box Configuration | ||||
| Mounting Location | Top | |||
| MFC Make and Model | Horiba, Brooks | |||
| Line Capacity | IGS (16 Line) | |||
| Gas Box P/N – PM2 | 571-033051-004 | |||
| Gas Box P/N – PM3 | 571-033051-003 | |||
| Gas Box P/N – PM4 | 571-033051-003 | |||
| Gas Configuration | ||||
| Line | PM 1 | PM 2 | PM 3 | PM 4 |
| 1 | N2 – 200 sccm | N2 – 200 sccm | N2 – 200 sccm | |
| 2 | BCl3 – 500 sccm | BCl3 – 500 sccm | BCl3 – 500 sccm | |
| 3 | Ar – 500 sccm | Ar – 500 sccm | Ar – 500 sccm | |
| 4 | O2 – 20 sccm | O2 – 20 sccm | O2 – 20 sccm | |
| 5 | O2 – 500 sccm | O2 – 500 sccm | O2 – 500 sccm | |
| 6 | C4F8 – 200 sccm | C4F8 – 200 sccm | C4F8 – 200 sccm | |
| 7 | CF4 – 200 sccm | CF4 – 200 sccm | CF4 – 200 sccm | |
| 8 | CHF3 – 300 sccm | CHF3 – 300 sccm | CHF3 – 300 sccm | |
| 9 | CH2F2 – 100 sccm | CH2F2 – 100 sccm | CH2F2 – 100 sccm | |
| 10 | HBr – 500 sccm | HBr – 500 sccm | HBr – 500 sccm | |
| 11 | SF6 – 200 sccm | SF6 – 200 sccm | SF6 – 200 sccm | |
| 12 | Cl2 – 100 sccm | Cl2 – 100 sccm | Cl2 – 100 sccm | |
| 13 | CH3F – 300 sccm | CH3F – 300 sccm | CH3F – 300 sccm | |
| 14 | CO – 300 sccm | CO – 300 sccm | CO – 300 sccm | |
| 15 | H2 – 200 sccm | H2 – 200 sccm | H2 – 200 sccm | |
| 16 | He – 500 sccm | He – 500 sccm | He – 500 sccm | |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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