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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2009-07-01
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
Date of Audit 7/31/2025
Serial Number 123946
Wafer Size (inches) 12
Number of Cassette / FOUP Positions 3
Loadport Make/Model Brooks
Software Version Windows 10
Date of Last PM N/A
Is System On-Line? No
CE Mark Certified? Yes
SECS II Interface Yes
Electrical Requirements 208v, 3ph, 400A to mainframe, 208v, 3ph, 225A to RPDB
Can Produce Wafers AS IS? Yes
Any Known Field Modifications? Yes (iLon600) Upgrade
All Cables Present? Yes
2300 Version 2
System Configuration Chamber Type Vintage Serial Number
PM 2: Kiyo 45; 2009; 23K45-982(F123946-PM2)
PM 3: Kiyo 45; 2009; 23K45-983(F123946-PM3)
PM 4: Kiyo 45; 2009; 23K45-984(F123946-PM4)
Included
Signal Lamp Tower
Key Mainframe Items
Robot Type Brooks
Robot Part Number ATR8
Mag 7
OHT Configured (300mm Only)
PM2, 3, 4 – Endpoint Type: LSR w/ OES
Turbo Pump Details
Chamber Position
Turbo Mfgr.
Turbo Model: PM 2, 3, 4:
Edwards
STP-XA2703CV
RF/Microwave Generator Details
Chamber Position
Mfgr.
Model
PM 2
APEX
3156110-213
PM 2
APEX
3156110-214
PM 3
APEX
3156110-213
PM 3
APEX
3156110-214
PM 4
APEX
3156110-213
PM 4
APEX
3156110-214
Loadlock Pump
Manufacturer Edwards
Model IPX
Included With System Yes
Main Etch Chamber Pump
Manufacturer Edwards
Model IXM600M
Quantity Required 3
Included With System No
Chiller Information
Manufacturer Maruyama
Model eYR8030SC(LN)
Machine Hours 0
Electrical Requirements
208v, 3ph, 30A
# of Cooling Channels One
Quantity Required 3
Included With System No
Gas Box Configuration: Mounting Location Top
MFC Make and Model
Horiba, Brooks
Line Capacity
IGS (16 Line)
Gas Box P/N – PM2
571-033051-004
Gas Box P/N – PM3
571-033051-003
Gas Box P/N – PM4
571-033051-003
Gas Configuration
Line
PM 1
PM 2
PM 3
PM 4
1
N2 – 200 sccm
N2 – 200 sccm
N2 – 200 sccm
2
BCl3 – 500 sccm
BCl3 – 500 sccm
BCl3 – 500 sccm
3
Ar – 500 sccm
Ar – 500 sccm
Ar – 500 sccm
4
O2 – 20 sccm
O2 – 20 sccm
O2 – 20 sccm
5
O2 – 500 sccm
O2 – 500 sccm
O2 – 500 sccm
6
C4F8 – 200 sccm
C4F8 – 200 sccm
C4F8 – 200 sccm
7
CF4 – 200 sccm
CF4 – 200 sccm
CF4 – 200 sccm
8
CHF3 – 300 sccm
CHF3 – 300 sccm
CHF3 – 300 sccm
9
CH2F2 – 100 sccm
CH2F2 – 100 sccm
CH2F2 – 100 sccm
10
HBr – 500 sccm
HBr – 500 sccm
HBr – 500 sccm
11
SF6 – 200 sccm
SF6 – 200 sccm
SF6 – 200 sccm
12
Cl2 – 100 sccm
Cl2 – 100 sccm
Cl2 – 100 sccm
13
CH3F – 300 sccm
CH3F – 300 sccm
CH3F – 300 sccm
14
CO – 300 sccm
CO – 300 sccm
CO – 300 sccm
15
H2 – 200 sccm
H2 – 200 sccm
H2 – 200 sccm
16
He – 500 sccm
He – 500 sccm
He – 500 sccm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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