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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Hopewell Junction, United States
Available date: Currently Available
Date of Audit 7/31/2025
Serial Number 109059
Wafer Size (inches) 12
Number of Cassette / FOUP
Positions 3
Loadport Make/Model Brooks
Software Version Windows 10
Date of Last PM N/A
Is System On-Line? No
CE Mark Certified? Yes
SECS II Interface Yes
Electrical Requirements 208v, 3ph, 400A to mainframe, 208v, 3ph, 225A to RPDB
Can Produce Wafers AS IS? No (Equipment debug had not been completed)
Any Known Field Modifications? Yes (iLon600) Upgrade
All Cables Present? Yes
Etcher Mainframe Type Select One
2300 Version 2 Yes
System Configuration
Chamber Type Vintage Serial Number
PM 1
PM 2 Kiyo 45 2010 23K45-1446(F127993-PM4)
PM 3 Kiyo 45 2008 23K450786(F109059-PM3)
PM 4 Kiyo 45 2008 23K450787(F109059-PM4)
Signal Lamp Tower Yes
Key
Mainframe Items
Robot Type Brooks
Robot Part Number 799-000492-002 or 003
799-020826-002
OHT Configured (300mm Only) Yes
Key Chamber Items
PM1 – Endpoint Type
PM2 – Endpoint Type LSR w/ OES
PM3 – Endpoint Type LSR w/ OES
PM4 – Endpoint Type LSR w/ OES
PM5 – Endpoint Type
PM6 – Endpoint Type
Turbo Pump Details
Chamber Position Turbo Mfgr. Turbo Model
PM 1
PM 2 Edwards STP-XA2703CV
PM 3 Edwards STP-XA2703CV
PM 4 Edwards STP-XA2703CV
RF/Microwave Generator Details
Chamber Position Mfgr. Model
PM 1
PM 1
PM 2 APEX 3156110-213
PM 2 APEX 3156110-214
PM 3 APEX 3156110-213
PM 3 APEX 3156110-214
PM 4 APEX 3156110-213
PM 4 APEX 3156110-214
Loadlock Pump
Manufacturer Edwards
Model IPX
Included With System Yes
Main Etch Chamber Pump
Manufacturer Edwards
Model IXM600M
Quantity Required 3
Included With System No
Chiller Information
Manufacturer Maruyama
Model eYR8030SC(LN)
Electrical Requirements 208v, 3ph, 30A
# of Cooling Channels One
Quantity Required 3
Included With System No
Gas Box Configuration
Mounting Location Top
MFC Make and Model Horiba, Brooks
Line Capacity IGS 16 Line
Gas Box P/N – PM1
Gas Box P/N – PM2 571-033051-002
Gas Box P/N – PM3 571-033051-003
Gas Box P/N – PM4 571-033051-004
Gas Configuration
Line PM 1 PM 2 PM 3 PM 4
1 N2 – 200 sccm N2 – 200 sccm N2 – 200 sccm
2 BCl3 – 500 sccm BCl3 – 500 sccm BCl3 – 500 sccm
3 Ar – 500 sccm Ar – 500 sccm Ar – 500 sccm
4 O2 – 20 sccm O2 – 20 sccm O2 – 20 sccm
5 O2 – 500 sccm O2 – 500 sccm O2 – 500 sccm
6 C4F8 – 200 sccm C4F8 – 200 sccm C4F8 – 200 sccm
7 CF4 – 200 sccm CF4 – 200 sccm CF4 – 200 sccm
8 CHF3 – 300 sccm CHF3 – 300 sccm CHF3 – 300 sccm
9 CH2F2 – 100 sccm CH2F2 – 100 sccm CH2F2 – 100 sccm
10 HBr – 500 sccm HBr – 500 sccm HBr – 500 sccm
11 SF6 – 200 sccm SF6 – 200 sccm SF6 – 200 sccm
12 Cl2 – 100 sccm Cl2 – 100 sccm Cl2 – 100 sccm
13 CH3F – 300 sccm CH3F – 300 sccm CH3F – 300 sccm
14 CO – 300 sccm CO – 300 sccm CO – 300 sccm
15 H2 – 200 sccm H2 – 200 sccm H2 – 200 sccm
16 He – 500 sccm He – 500 sccm He – 500 sccm
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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