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Macquarie Semiconductor and Technology on behalf of ON Semiconductor (SCI LLC)

LAM Research 2300e5 KIYO EX Poly

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Asset ID: 228392

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LAM Research

2300e5 KIYO EX Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2015-07-28

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Hopewell Junction, United States

Available date: Currently Available


Description:

2300e5 (5 position)
Date of Audit7/31/2025
Serial Number150294
Wafer Size (inches)12
Number of Cassette / FOUP Positions3
Loadport Make/ModelTDK
TAS300
Software VersionWindows 10
Date of Last PMN/A
Is System On-Line?No
Off-Line Date (if applicable)3/19/2025
CE Mark Certified?Yes
SECS II InterfaceYes
Electrical Requirements208v, 3ph, 400A to mainframe
208v, 3ph, 400A to RPDB
OEM Audit Available?No
Decontamination Report Exists?No 
Can Produce Wafers AS IS?Yes (PM1-PM4)
Any Known Field Modifications?Yes – Installed Ion Bars, and modified RPDB for Dual Channel TCUs
All Cables Present?Yes
 Chamber TypeVintageSerial Number      
PM 1 Kiyo E2015R23PL0669(F162510-PM3)
PM 2Kiyo E201423KYE-1423(F152607-PM2)
PM 3Kiyo E201523KY-1126(F160959-PM3)
PM 4Kiyo E201523KY-1229(F160959-PM4)
PM 5Kiyo E201523KYE-2040(F161452-PM1)
Signal Lamp TowerYes
Key Mainframe Items 
Robot TypeKawasaki
Robot Part NumberNT510 
OHT Configured (300mm Only)Yes  /  No
Key Chamber Items  
PM1 – Endpoint TypeOES2 + LSR
PM2 – Endpoint TypeOES2 + LSR
PM3 – Endpoint TypeOES2 + LSR
PM4 – Endpoint TypeOES2 + LSR
PM5 – Endpoint TypeOES2 + LSR
PM6 – Endpoint Type 
Chamber PositionTurbo Mfgr.Turbo Model
PM 1 EdwardsSTP-XA2703CV
PM 2EdwardsSTP-XA2703CV
PM 3EdwardsSTP-XA2703CV
PM 4EdwardsSTP-XA2703CV
PM 5EdwardsSTP-XA2703CV
PM 6  
Chamber Position   Mfgr.    Model 
PM 1APEX1513
PM 1Paramount3156310-020
PM 2 APEX1513
PM 2Paramount3156310-020
PM 3APEX1513
PM 3Paramount3156310-020
PM 4APEX1513
PM 4Paramount3156310-020
PM 5APEX1513
PM 5Paramount3156310-020
Loadlock Pump
ManufacturerKashiyama
ModelMU100XU-200
Included With SystemYes
Main Etch Chamber Pump
ManufacturerEdwards
ModelIXM600M
Quantity Required5
Included With SystemNo
Chiller Information
ManufacturerMaruyama
ModelHCL203-LD
Electrical Requirements208v, 3ph, 75A
# of Cooling ChannelsTwo
Quantity Required5
Included With SystemNo
Gas Box Configuration
Mounting LocationTop
MFC Make and ModelHoriba / Brooks
Line CapacityJTS 16 Line with Side He Tuning Ballast
Gas Box P/N – PM1571-065780-xxxx 
Gas Box P/N – PM2571-065780-702
Gas Box P/N – PM3571-065780-H7829
Gas Box P/N – PM4571-065780-H7829
Gas Box P/N – PM5571-065780-H7829E
Gas Box P/N – PM6 
Gas Configuration
LinePM 1PM 2 PM 3 PM 4 PM 5
1SiCl4 – 100 sccmSiCl4 – 100 sccmSiCl4 – 100 sccmSiCl4 – 100 sccmSiCl4 – 100 sccm
2BCl3 – 500 sccmBCl3 – 500 sccmBCl3 – 500 sccmBCl3 – 500 sccmBCl3 – 500 sccm
3CHF3 – 300 sccmCHF3 – 300 sccmCHF3 – 300 sccmCHF3 – 300 sccmCHF3 – 300 sccm
4CH3F – 300 sccmCH3F – 300 sccmCH3F – 300 sccmCH3F – 300 sccmCH3F – 300 sccm
5CH2F2 – 100 sccmCH2F2 – 100 sccmCH2F2 – 100 sccmCH2F2 – 100 sccmCH2F2 – 100 sccm
6C2H4 – 20 sccmC2H4 – 20 sccmC2H4 – 20 sccmC2H4 – 20 sccmC2H4 – 20 sccm
7CF4 – 200 sccmCF4 – 200 sccmCF4 – 200 sccmCF4 – 200 sccmCF4 – 200 sccm
8SF6 – 200 sccmSF6 – 200 sccmSF6 – 200 sccmSF6 – 200 sccmSF6 – 200 sccm
9Cl2 – 500 sccmCl2 – 500 sccmCl2 – 500 sccmCl2 – 500 sccmCl2 – 500 sccm
10HBr – 500 sccmHBr – 500 sccmHBr – 500 sccmHBr – 500 sccmHBr – 500 sccm
11O2 – 300 sccmO2 – 300 sccmO2 – 300 sccmO2 – 300 sccmO2 – 300 sccm
12N2 – 500 sccmN2 – 500 sccmN2 – 500 sccmN2 – 500 sccmN2 – 500 sccm
13NF3 – 500 sccmNF3 – 500 sccmNF3 – 500 sccmNF3 – 500 sccmNF3 – 500 sccm
14He – 500 sccmHe – 500 sccmHe – 500 sccmHe – 500 sccmHe – 500 sccm
15Ar – 500 sccmAr – 500 sccmAr – 500 sccmAr – 500 sccmAr – 500 sccm
16H2 – 200 sccmH2 – 200 sccmH2 – 200 sccmH2 – 200 sccmH2 – 200 sccm
TuningO2 – 50 sccmO2 – 50 sccmO2 – 50 sccmO2 – 50 sccmO2 – 50 sccm
STGHe – 300 sccmHe – 300 sccmHe – 300 sccmHe – 300 sccmHe – 300 sccm


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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