Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: To be determined
Current Equipment Status: Available
Location of Equipment: Gyeonggi-do, Korea, Republic of
Available date: TBD
2300 SYSTEM
1*2300e5 Platform
3*2300 Kiyo EXP PM
2300 PLATFORM (E)
1* 3 FOUP TDK
3* Hermos Carrier ID
1* Light Curtain w/ OHT/RGV
1* Input Buffer Corr Res w/o Exh
1* 25 Slot Aux Buffer (Corr Res)
1* Conditioning Station (7 Wafer)
1* User Interface: Side and Front Monitor U
1* System UPS Circuitry
1* Earth Leakage Breaker
1* Cable: TM-Subpanel, 100ft
1* Signal Light Tower, R-O-G-B Slim Line
1* VTM Pump: Edwards (EPX)
1* Light Curtain
1* APCS
1* SVID & Facility Interface Board
1* VTM Breakout Board/Cover
1* ATM Robot Removal Kit
1* Metric to Inch Conv. Fittings
1* Light Tower Buzzer
1* NSR10702, N2 Flow Monitoring on UPC
1* NSR101435,TM UPS bypass kit with Maratho
1* Sys Calibration and Alignment
1* VTM Robot Lift
1* Ionizer kit
1* Robot CDM
2300 PROCESS MODULE
1* 2300 STRIP45 OPTIONS
OES Endpoint Option
Stainless Steel w/ 5/8 - 1/2 Reducer
3* 2300 KIYO EXP
2700 l/s BOCE Turbo Pump
Gas Feed: Top & Side
Bias Match: 1.5kW HVBP Sync
NSR101469, Crystal Window-861 (4EA)
NSR100999, Chamber exhaust duct
NSR101420, FWD build KiyoEX for 173 LTC
NSR101836, Kiyo EXP chamber process manom
NSR102151, NSR for Kiyo EXP
NSR102413, to drive Karlez Oring & Parti
NSR102428, -668 SiC ER Set for Kiyo EXP
1* PM Maint: Quick Clean Kit
2300 GAS BOX
2300 KIYO EXP JS GAS BOX
3* 9 Gas Configuration (JetStream)
21* Jetstream Gas Line
9* Heated Gas Line
1* AFVi
3* NSR100802, GL14 C4F8(100),TG1C4F6(100,H
1* Facility Interface Box (System)
17* Facility Interface Box (Per Line)
2* Future PM Containment
2300 PERIPHERALS
3* Cust. Supply: Non-Qual Pump
3* Cust. Supply: Non-Qual TCU
2300 SOFTWARE
1* TEK Software
1* Wafer Flow Tuning
1* APC Recipe Tuning Host
1* 2nd HSMS
1* NSR8423, Hardware Firewall
1* NSRL1000, Local office
1* 2300 Strip45 PM
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
