Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Rapid Thermal Processing (RTP) Equipment
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· CGA software version vg3B4.90b_34
· FI with fan filter unit, cool down assembly and aligner, FI UI s/w fB4.90_15 Beta
· (2) 25 wafer ADOe FOUP loadports
· 2 x AC rack (enclosed within tool)
· (2) GE K factor transformers model 9T23Q3467G13 480V pri/208V sec 225kVA
· Combination of Unit and Stec MFC's
· CE Mark
· AMAT Ergotron roll around with monitor/keyboard
· Pre-facilities box, "slimdock" version
· Photohelic exhaust pressure unit
· Toxic skins for both chambers
· Scavenger exhausts for both chambers
· FI robot
o Manufacturer: Yaskawa
o Model: XU-CN111xA-BTV-PA
o Firmware V6.04
· Chamber A
o AMAT Radiance Rapid Thermal Processing (RTP) 300mm Vantage chamber
o 409 tungsten halogen lamps
o 7 x temperature probes, 1 x emissometer
o Reflector plate
o Edge ring and support cylinder
o WRLD maglev system with firmware MB340g4-RTP
· Chamber B
o AMAT Radiance Rapid Thermal Processing (RTP) 300mm Vantage chamber
o 409 tungsten halogen lamps
o 7 x temperature probes, 1 x emissometer
o Reflector plate
o Edge ring and support cylinder
o WRLD maglev system with firmware MB340g4-RTP
· Additional details available upon request
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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