Macquarie Semiconductor and Technology on behalf of Intel Resale Corporation
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Portland, United States
Available date: Currently Available
· Used in mask production line.
· Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, a studs loader jig, an epoxy dispense unit, and a control panel.
· A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU.
· Automated SMIF POD factory interface: Where SMIF POD is loaded to transfer reticles to toolbox unit for studs mount treatment.
· Toolbox unit consists of; two cameras, top cover, four stud holder assembly modules with capability to move along X, Y, Z and Rz (rotation around Z) axis to align with reticle, four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs mount treatment.
· Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface.
· Studs loader jig: Is used to pre-align studs in correct orientation to be transferred to stud holder assembly modules.
· Epoxy dispense unit: Is used to calibrate epoxy deposition amount on each studs. This unit has functional settings to accommodate epoxy viscosity variation as a function of time.
· Control panel: Facilitates software interface to navigate through studs mount sequences (start/end process).
· SFT-100 is a semi-automated tool, where operator performs studs transfer and reticle movement to toolbox prior to studs mount treatment. Operator then sends mount command through control panel to initiate the process.
· Additional details available upon request.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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