Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2014-05-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
| MiCAP Number | 1214113 | |||||
| Section 1: Tool General Information | ||||||
| Micron MISTI/LID # | MSPRK48300 | |||||
| Vendor Tool Serial # | 429825 | |||||
| Date of Tool Move-In | ||||||
| Tool Excess Date | 12/02/2027 | |||||
| Tool Current Status | In Production | |||||
| Tool Location | Cleanroom | |||||
| Any modification/ conversion/ refrofit was perform to the tool? | No | |||||
| Any defective or missing parts | No | |||||
| Section 2: Tool Specific Information | ||||||
| OEM | AMAT | |||||
| Tool Model | Producer GT + | |||||
| Software Version (include revision #) | ||||||
| System Power Rating | ||||||
| Loading Configuration | ||||||
| Tool under OEM service contract? | ||||||
| Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc) | ||||||
| Part Type | Part Description | Part number | Date of Change | Qty | Remark | |
| 1 | NA | |||||
| 2 | ||||||
| 3 | ||||||
| For multi-chms system, please indicate the chamber type of individual chm, do not use Micron Proprietary names for Chemical/Gases | ||||||
| (Section is also application to tank configuration for Wet bench) | ||||||
| Chamber Description | Chamber Chemicals Gases Used | |||||
| Chamber A | HAS | SiH4, NH3, NF3, N20, Ar, He, N2 | ||||
| Chamber B | HAS | SiH4, NH3, NF3, N20, Ar, He, N2 | ||||
| Chamber C | HAS | SiH4, NH3, NF3, N20, Ar, He, N2 | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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