Macquarie Semiconductor and Technology on behalf of Confidential Seller
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2018-06-04
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
|
Date of Audit |
9/30/2025 |
|
Electrical Requirements |
208 3P 79Amp |
|
Original Ship Date from Novellus Chip Semi |
Concept Systems Manufacturing Date 6-4-2018 |
|
Wafer Size (inches) |
6 |
|
Wafer Type |
flat |
|
Install Type |
Through-the-wall / Stand Alone |
|
Software Version |
4.433 |
|
Is System On-Line? |
YES |
|
Off-Line Date (if applicable) |
11/18/2025 |
|
CE Mark Certified? |
YES |
|
Clean Room Manuals |
NO |
|
Standard Manuals |
YES |
|
OEM Audit Available? |
NO |
|
Decontamination Report Exists? |
YES |
|
Can Produce Wafers AS IS? |
YES |
|
All Cables Present? |
YES |
|
Frame Type |
Chamber Type / Process Types |
|
C1-150 |
Dielectric / SiO2, SiN, Nitride |
|
Directory of Chamber Types for 3 |
Process |
|
Dielectric |
SiO2, SiN, Nitride, TEOS |
|
Signal Lamp Tower |
YES |
|
Computer Type |
Y2K Pentium Computer W/4.433 SW |
|
Robot Type |
Single arm C1 |
|
Cassette Platform |
150mm |
|
Front Monitor |
LCD |
|
Side Monitor |
LCD |
|
Integrated SMIF |
NO |
|
SECS / GEMS |
YES |
|
Micro Contamination Option |
YES |
|
Process Type |
Dielectric |
|
Heater Block P/N |
Pinned, scribed (CPS) |
|
Shower Head P/N |
OEM Shower heads, 8 stations |
|
Digital Dynamics IOC |
NO |
|
Heated Valves |
YES |
|
Gate Valve Mfg & Model |
VAT |
|
Throttle Valve |
VAT |
|
RF Match Type |
TRAZAR |
|
HF RF Generator |
RFG3000 |
|
LF RF Generator |
PDX1400 |
|
Sigma 6 TEOS Cabinet |
NO |
|
Duraflo Cabinet |
NO |
|
End Point Detector |
NO |
|
Included With System |
NO |
|
Manufacturer |
Edwards |
|
Included With System |
YES |
|
Number of Channels |
8-Channel |
|
Gas Line # / Gas / Flow (sccm) / MFC Mfgr. / MFC Model | |
|
1 / N2 / 5 / 1660 | |
|
2 / SiH4 / 1 / 1660 | |
|
3 / SiH4 / 2 / 1660 | |
|
4 / PH3 / 2 / 1660 | |
|
5 / N2O / 20 / 1660 | |
|
6 / NH3 / 5 / 1660 | |
|
7 / C2F6 / 2 / 1660 | |
|
8 / O2 / 20 / 1660 | |
|
9 / 1660 | |
|
10 / 1660 | |
|
11 / 1660 |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
