Applied Materials (AMAT) P-5000 Mark II DLH PECVD Silane

Equipment details:

Date of Manufacture: 2010-10-01

Currently Configured for: 150mm

Current Equipment Status: Incoming

Location of Equipment: Durham, United States

Available date: TBD

Description:

NOTES:             

1)    System initially configured for 100mm.  Converted to 150mm in 2012.

2)    Refurbished tool purchased from OEM Group, Inc.   

3)    Center finder board retrofitted for transparent and opaque substrates.  

4)         

General System Info

Tool ID P5000CVD003

Serial Number              11782

Wafer Size (inches)   6       NOTE 1

Install Type     Through-the-wall

Original Ship Date from AMAT            10/2010 NOTE 2

Software Version        

Date of Last PM           Sep-25

Is System On-Line?   Yes

Off-Line Date (if applicable) n/a

CE Mark Certified?    No

OEM Audit Available?              No

Decontamination Report Exists?     No

Can Produce Wafers AS IS? Yes

Any Known Field Modifications?      Yes  NOTE 3

All Cables Present?   Yes

Etcher Mainframe Type           

P5000 Mark I  

P5000 Mark II yes

P5000 Mark II XT         

System Configuration             Chamber Type

Position A        Silane DCVD

Position B        Silane DCVD

Position C        Silane DCVD

Position D        Empty

Front of             System

Ch F (C)            Ch E (C)

Ch D    Ch C

Ch B    Ch A

Gas      Panel

Wafer Orienter              Orienter

Key Common Options             Included?

Electrostatic Chuck  No

Independent Backside He Cool        No

VDS (Vapor Delivery System)              No

Signal Lamp Tower     No

Bolt-On-SMIF No

Clean Room Manuals             Yes

Standard Manuals     No

Remote Service Monitors     yes

Key P5000 Mainframe Items               

Phase 3 Robot              Yes

Phase 3 Cassette Handler    Yes

Bolt-Down Lid               Yes

Storage Elevator          29 Slots

Expanded (21 Slot) VME         Yes

Floppy Drive Type       3 ½

Mini-Controller            Yes

Gas Panel Type            28

CES Gas Panel             Yes

CVD Chamber Items                

RF Match Type              Phase IV

Slit Liner Door               No

Lid Type             Boltdown

Autobias          No

Endpoint          Standard

Chamber Liner             No

Cathode Type Susceptor

Lid Gas Distribution GDP

Remote Frame Status              Included?

Stand Alone Endpoint System           No

RF Generator Rack    Yes

Remote Frame w/AC Box      Yes

Chamber Lid Type Details    

Chamber Position     AMAT Part#

Position A        

Position B        

Position C        

Position D        

 3 RF Generator Details         

Chamber Position /        Mfgr. /     Model    

Position A  / OEM / 12B      

Position A        

Position B / OEM / 12B       

Position B        

Position C / OEM / 12B       

Position C        

Position D        

Position D        

 4 CVD Chamber Roughing Pumps

CVD Chamber Pump  

Manufacturer Edwards

Model iH600

Quantity Required     3

Included With System             No

Load Lock Pump          

Manufacturer Edwards

Model iH80 Series

Included With System             Yes

AMAT Heat Exchanger              

Model AMAT 0

Quantity Required     1

Included With System             Yes

 0 Gas  onfiguration

Gas Line # / Gas / Flow (sccm) / MFC Mfgr. / MFC Model

1 / $N2$ / 3000 / Brooks / 5850/5964  

2 / He / 5000 / Ditto            

3 / N2O / 3000 / Ditto        

4 / NH3 / 200 / Ditto           

5 / 2%SiH4/Bal He / 5000 / Ditto

6 / CF4 / 1600 / Ditto          

7 / N2O / 50 / Ditto