Macquarie Semiconductor and Technology on behalf of Confidential Seller
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P-5000 Mark II DLH PECVD Silane
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2010-10-01
Currently Configured for: 150mm
Current Equipment Status: Incoming
Location of Equipment: Durham, United States
Available date: TBD
| Precision 5000 DCVD, AMAT |
| NOTES: |
| 1) System initially configured for 100mm. Converted to 150mm in 2012. |
| 2) Refurbished tool purchased from OEM Group, Inc. |
| 3) Center finder board retrofitted for transparent and opaque substrates. |
| Wafer Size (inches) 6 NOTE 1 |
| Install Type Through-the-wall |
| Original Ship Date from AMAT 10/2010 NOTE 2 |
| Software Version 5.0.1 |
| Date of Last PM 9/1/2025 |
| Is System On-Line? No |
| Off-Line Date (if applicable) n/a |
| CE Mark Certified? No |
| OEM Audit Available? No |
| Decontamination Report Exists? No |
| Can Produce Wafers AS IS? No |
| Any Known Field Modifications? Yes NOTE 3 |
| All Cables Present? Yes |
| P5000 Mark II yes |
| System Configuration Chamber Type |
| Position A Silane DCVD |
| Position B Silane DCVD |
| Position C Silane DCVD |
| Position D Empty |
| Position E (Centura Only) |
| Position F (Centura Only) |
| Front of System |
| Ch F (C) Ch E (C) |
| Ch D Ch C |
| Ch B Ch A |
| Gas Panel |
| Key Common Options Included? |
| Electrostatic Chuck No |
| Independent Backside He Cool No |
| VDS (Vapor Delivery System) No |
| Signal Lamp Tower No |
| Bolt-On-SMIF No |
| Clean Room Manuals Yes |
| Standard Manuals No |
| Remote Service Monitors yes |
| Key P5000 Mainframe Items |
| Phase 3 Robot Yes |
| Phase 3 Cassette Handler Yes |
| Bolt-Down Lid Yes |
| Storage Elevator 8 Slots |
| Expanded (21 Slot) VME Yes |
| Floppy Drive Type 3 ½ |
| Mini-Controller Yes |
| Gas Panel Type 28 line |
| CES Gas Panel No |
| CVD Chamber Items |
| RF Match Type Phase IV |
| Slit Liner Door No |
| Lid Type Boltdown |
| Autobias No |
| Endpoint Standard |
| Chamber Liner No |
| Cathode Type Susceptor |
| Lid Gas Distribution GDP |
| Remote Frame Status Included? |
| Stand Alone Endpoint System No |
| RF Generator Rack Yes |
| Remote Frame w/AC Box Yes |
| Chamber Lid Type Details |
| Chamber Position AMAT Part# |
| Position A |
| Position B |
| Position C |
| Position D |
| RF Generator Details |
| Chamber Position Mfgr. Model |
| Position A OEM 12B |
| Position A |
| Position B OEM 12B |
| Position B |
| Position C OEM 12B |
| Position C |
| Position D |
| Position D |
| CVD Chamber Roughing Pumps |
| CVD Chamber Pump |
| Manufacturer Edwards |
| Model iH600 |
| Quantity Required 3 |
| Included With System No |
| Load Lock Pump |
| Manufacturer Edwards |
| Model iH80 Series |
| Included With System Yes |
| Neslab Chiller |
| Quantity Required 45659 |
| AMAT Heat Exchanger |
| Model AMAT 0 |
| Quantity Required 1 |
| Included With System Yes |
| Gas configuration |
| Gas Line # / Gas / Flow (sccm) / MFC Mfgr. / MFC Model |
| 1 / $N2$ / 3000 / Brooks / 5850/5964 |
| 2 / He / 5000 / Ditto |
| 3 / N2O / 3000 / Ditto |
| 4 / NH3 / 200 / Ditto |
| 5 / 2%SiH4/Bal He / 5000 / Ditto |
| 6 / CF4 / 1600 / Ditto |
| 7 / N2O / 50 / Ditto |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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