Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 11/21/2025
AMAT PRGT3
Tool config is based on original PO, please verify tool details at tool inspection
OEM: AMAT
Tool Model: PRGT3
Software Version (include revision): pmB5.7_231
System Power Rating: 208V
Loading Configuration: 4LP
Retrofit Part Type 1: N2 LP
Retrofit Part Description 1: LP
Retrofit Qty 1: 4
Chamber Name 1: CHA
Chamber Name 2: CHB
Chamber Name 3: CHC
Chamber 1 Description: PE Silane
Chamber 2 Description: PE Silane
Chamber 3 Description: PE Silane
Chamber 1 Chemicals Gases Used: SiH4_Hi/SiH4_Lo/NH3 HI/NH3 Lo/TMS/NF3/AR CLN/N2/O2/HE_Hi/AR/N2O_Hi/N2O_Lo
Chamber 2 Chemicals Gases Used: SiH4_Hi/SiH4_Lo/NH3 HI/NH3 Lo/TMS/NF3/AR CLN/N2/O2/HE_Hi/AR/N2O_Hi/N2O_Lo
Chamber 3 Chemicals Gases Used: SiH4_Hi/SiH4_Lo/NH3 HI/NH3 Lo/TMS/NF3/AR CLN/N2/O2/HE_Hi/AR/N2O_Hi/N2O_Lo
OEM Cable 1: EMO cable
OEM Cable 2: HX water pipe
OEM Cable 3: Device net/Pump signal
OEM Cable Length 1: 2250
OEM Cable Length 2: 2250
OEM Cable Length 3: 2250
N2 Load Port Exists 1: Yes
N2 Load port Vendor 1: 聖凰
N2 Load Port Exists 2: Yes
N2 Load port Vendor 2: 聖凰
N2 Load Port Exists 3: Yes
N2 Load port Vendor 3: 聖凰
N2 Load Port Exists 4: Yes
N2 Load port Vendor 4: 聖凰
Optional Gas 1: SiH4_Hi - 800
Optional Gas 2: SiH4_LO -300
Optional Gas 3: NH3 LO - 500
Optional Gas 4: NH3 HI - 4000
Optional Gas 5: TMS - 200
Optional Gas 6: NF3 - 5000
Optional Gas 8: AR CLN - 10000
Optional Gas 9: O2 - 2000
Optional Gas 10: N2 - 25000
Optional Gas 11: HE_Hi - 15000
Optional Gas 12: Ar - 8000
Optional Gas 13: N2O_Lo - 5000
Optional Gas 14: N2O_Hi - 15000
Optional Gas 15: He Lo - 5000
Optional Gas 17: N2 PURG
Optional Gas 18: N2 PURG
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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