Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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PECVD (Chemical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 9/16/2026
Tool config is based on original PO, please verify tool details at tool inspection
Platform Type: Producer SE
Chamber Type: CChAPF
Process: DPAPF
Chamber Qty: 3
Required Software Revisions
CGAFE: B2.30a_55
System Software: B4.1_118
GP: gB7.50_43
Supporting Remote Units:
Number of Loadports: 2
Transfer Purge?: YES - Pressure is 300mTorr
Metrology Unit: N/A
System Heat Exchanger Qty: 1 - Shared between A,B,C (75degC)
Hardware Configuration
RF Generator 1: 0920-00139
Heater: 0010-59787
Slit Valve: 9992-00594
RF Filter: 0090-05831
Foreline TV/Foreline ISO: 3870-05685
RPS: 0190-40602
Gas Box: 0041-28308
Blocker,APF,300mm Producer: 0020-63185
Faceplate,APF,300mm Producer SE: 0022-15497
Isolator,Ceramic,CVD Low K,300mm Producer SE: 0200-01427
Sleeve Slit Valve APF Producer SE ceramic: 0021-25781
C-Channel Side 1 Producer SE APF: 0200-03406
C-Channel Side 2 Producer SE APF: 0200-03407
Filler Chamber 1 APF Producer SE: 0040-75150
Filler Chamber 2 APF Producer SE: 0040-75151
Pumping Liner Top: 0200-07071/ 0200-05623
Liner,Ceramic Middle, Producer SE: 0200-02396
Liner,Ceramic Bottom, Producer SE APF: 0200-03414
Lift Pin 170 Fixed Floating 300mm Producer SE: 0200-03314
Hoop 140 Fixed Floating 300mm Producer SE: 0200-08334
Liner Pump Port Outer Producer SE APF: 0021-25808
Liner Pump Port Inner Producer SE APF: 0021-25807
Insert Equalization Port Producer SE: 0021-25812
Gas Panel
Line 1: EMPTY
Line 2: C3H6 - 3000 SCCM
Line 3: EMPTY
Line 4: H2 - 10000 SCCM
Line 5: NF3 - 1000 SCCM
Line 6: EMPTY
Line 7: EMPTY
Line 8: O2 - 15000 SCCM
Line 9: N2 - 15000 SCCM
Line 10: HE_HI - 5000 SCCM
Line 11: AR_CL - 10000 SCCM
Line 12: AR - 15000 SCCM
Line 13: HE_Lo - 1000 SCCM
Line 14: O2_CL - 10000 SCCM
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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