Macquarie Semiconductor and Technology on behalf of Intel Ireland Ltd.
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Leixlip, Ireland
Available date: Currently Available
Archer TL150i main attributes / components -
• Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement.
Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise.
Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.
• PHX TF3.0ZSS,SLP8,SF/N,WT,KTPA 1
• Dual Signal Tower - (3 Lamps, 57mm Diameter)
The signal towers are used to indicate the status of the Archer Family in various operation states. It is 57 mm in diameter and are 24 volts and incandescent. The colors may be re-arranged, and operation states are configurable.
• Multi Target Acquisition
• SCOL PBA
• AROL Accuracy Metrics
• Spectral Accuracy License
• MWL full license
• RQ apodizer support
• AROL Enhanced Nav Accuracy
• Tool Scripting
• Different flexure values pr test
• 11 Meter AC CB
• GEM/HSMS Factory Automation Software
• Factory automation with compliance to:
- HSMS (SEMI E37-0298)
- SECS-II (SEMI E5-0298)
- GEM (SEMI E37-0298)
• E84 Enablement for OHT, 3LP
- Tool software that controls the transfer of carriers (FOUPs) from an Over Head Track (OHT) system and/or a Rail-Guided Vehicle (RGV, on the floor) system to a tool
- Used in conjunction with Hokuyo PI/O devices
- Used only for tools with 3 loadports
• Three OHT Hokuyo PI/O Infrared Communication (Hardware) Devices
Enables automated delivery of carriers (FOUPs) by an Over Head Track (OHT) system Includes standard 5-meter cable
Model DMG-HB1-Z provides memory-logging capability Requires E84 enabled for OHT
Intended for use with Phoenix handler
One PIO device required for each FOUP loadport
• E87 Carrier Management Services (Based on E39)
- Tool software that manages automated and manual carrier (FOUP) transfers to and from the equipment
- Based on E39 Object Services
• E40 Process Job Management, E94 Control Job Management and E90 Substrate Tracking Tool software that manages Process Jobs (E40), Control Jobs (E94 based on E39), and Substrate Tracking (E90 based on E39)
• ARC Option
• RDM SW Compare & VALID Opt.
• RDM V9.0 Tool Client
Additional Items–
|
Part Number |
Description |
Qty |
|
0215663-000 |
BFCD OPTIONS |
1 EA |
|
0215688-000 |
Multy Location Targets |
1 EA |
|
0239701-000 |
HCSP |
1 EA |
|
0583688-000 |
ARC_ON TOOL |
1 EA |
|
0718720-000 |
CBL,KIT,11 METER,AC |
1 EA |
|
0744671-000 |
KIT,ACTIVE DAMPING OPTION FOR FLOATATION |
1 EA |
|
0569656-000 |
METROLOGY REFERENCE OPTION 1 |
1 EA |
|
0753497-000 |
NAS ARO |
1 EA |
|
0606768-000 |
OPT,CID,OMRON V640 V4,SELOP8,PHX,TFIM |
1 EA |
|
0763899-000 |
KIT, UPGRADE NAS SECOND CONNECTION |
1 EA |
|
0682882-000 |
CBL,HANDLER EXTENSION |
1 EA |
|
0799579-000 |
RUNTIME SIGNAL VAR INDEX |
1 EA |
|
0792122-000 |
AROL ENHANCED NAV ACCURACY |
1 EA |
|
0864368-000 |
AROL ALG SWOOP LICENSE |
1 EA |
|
0858091-000 |
RQ APODIZER SUPPORT |
1 EA |
|
0860363-000 |
TOOL SCRIPTING |
1 EA |
|
0821771-000 |
LABEL PRODUCT NAME ATL150i |
2 EA |
|
0781731-000 |
KIT,END EFFECTOR,VACUUM,SSC |
1 EA |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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