Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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Multi Block (Resist Coater/Developer)
Date of Manufacture: 2013-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
TEL Lithius Pro-V Immersion
| Software Version | 100.0.100.5 | ||
| Number of Loadports | 4 | ||
| Unique Tool Modifications/Special Software/Commercial Options | |||
| Modification | OEM Part # (if applicable) | ||
| Wrong resist prevention | |||
| Nano disable | |||
| Two piece grippers | |||
| RRC2 (Cyclohex addition) | |||
| O-ring fork on IRAH | |||
| ISHU bracket removal | |||
| BST2 | |||
| Description | Chamber/Module Serial # (if available) | ||
| Chm/Unit Position 1 | Rinse | 3-1,2,3,4,5,6,7,8; 8-1,2,3,4,6,7,8,10 | |
| Chm/Unit Position 2 | Developer | 3-1,2,3,4,5,6,7,8 | |
| Chm/Unit Position 3 | Rinse | 3-1,2,3,4,5,6,7,8 | |
| Chm/Unit Position 4 | Solvent | 4-1.2.3.4; 5-1.2.3.4 | |
| Chm/Unit Position 5 | Solvent | 4-1.2.3.4; 5-1.2.3.4 | |
| Chm/Unit Position 6 | Vapor Prime | 4-14, 4-15, 4-24, 4-25, 4-34, 4-35 | |
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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