Macquarie Semiconductor and Technology on behalf of OSRAM Opto Semiconductors (M) Sdn Bhd
The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Incoming
Location of Equipment: Penang, Malaysia
Available date: TBD
| Profile G10-AsP | |
| one-floor-design | Supply and Interconnects from TOP |
| reactor 5x8" configuration | quadruple injector |
| CTC- wafer handler SMIF-ready | 200mm-configuration |
| GMS Hydrides | N2, H2, AsH3, PH3, Silan, Cl2/N2, O2/N2, Ar |
| GMS MO | 12 stacks (10x Standard, 2 Double Dilute) |
| MFC/PC-Supplier: STEC | |
| 10x Bubbler Bath | Supplier: SMC |
| 9x EPISON V5 | |
| CT4000 Exhaust Filter System | |
| no pump, no p-trap | |
| 4x Entegris GPUS Purifier | N2, H2, AsH3, PH3 |
| Abatement-Interface | |
| MES-Interface | SECS II / GEM |
| SatRot H2/N2 | |
| CeilingPurge H2/N2/Ar | |
| EpiCurve TT AR 3W | 405nm, 633nm, 950nm |
| IGAR instead of Lightpipe | |
| 100kw RF-Generator | Hüttinger |
| CE-certified |
Gas Configuration:
· Standard Metalorganic Channel [MOG1]
(1xTMGa, 2xTMIn, 1xTMAl, 1xCBr4, 1xDEZn)
· Twin Standard Metalorganic channel [MOG1-D]
(2xTMGa, 2xTMAl)
· Dilution/Dopant metalorganic channel with extra pusher [MOG3]
(1xDETe, 1xCp2Mg)
· Standard Gas Channel, for high flow [MOG2]
(5% Cl2 in N2, 5% O2 in N2)
· Twin Standard Gas Channel with Pusher [MOG2-D]
(2xAsH3, 2xPH3)
· Dilution/Dopant gas channel with pressure controller and additional pusher [MOG4]
(1xSi2H6 in H2, 1000ppm)
· Carrier gas channel (Dummy Line) for balancing gas flow switching
(1xHydTop, 1xHydBottom)
· SMC Large bath B2
(TMGa-1/-2, TMAl-1/-2, TMIn-1.1/.2, TMIn-2.1/.2)
· MO-differential run/vent pressure balancing
· (MO, Hydride Top, Hydride Bottom)
· MO-Vac high pressure purge
· Epison 5
(2xTMGa, 2xTMAl, 2xTMIn, 1xCp2MG, 1xCBr4, 1xDETe)
· GMS Upgrades for Quadruple Injector
· MO Line Heating Temp > 38C from Bubbler Outler to connection point with Run MO line (2xTMIn)
· Double Bubbler Configuration (OS Special Configuration)
(2xTMIn, 1xCBr4, 1xCp2Mg)
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
